High purity chemical container with external level sensor and removable dip tube
First Claim
1. A container for high purity chemicals having a metallic shell, an inlet, an outlet, a level sensor on an external surface of said shell for determining the amount of high purity chemical in said container and a diptube connected to said outlet through which high purity chemical can be dispensed from said container by connection to a downstream high purity chemical delivery system.
2 Assignments
0 Petitions
Accused Products
Abstract
A container for high purity chemicals having an externally placed level sensor to avoid contamination of such chemical and for ready serviceability and a removeable liquid out diptube to facilitate cleaning during refilling or refurbishing. The container can have a valved inlet and outlet and can be constructed of stainless steel which is electropolished.
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Citations
20 Claims
- 1. A container for high purity chemicals having a metallic shell, an inlet, an outlet, a level sensor on an external surface of said shell for determining the amount of high purity chemical in said container and a diptube connected to said outlet through which high purity chemical can be dispensed from said container by connection to a downstream high purity chemical delivery system.
- 9. A container for high purity chemicals having a metallic shell, a valved inlet, a valved outlet, an ultrasonic level sensor removeably affixed to an external surface of said shell for determining the amount of high purity chemical in said container and a diptube removably connected to said outlet through which high purity chemical can be dispensed from said container by connection to a downstream high purity chemical delivery system.
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12. A container for high purity chemicals comprising a metallic shell with an external surface comprising a top surface, a side surface and a bottom surface, a valved inlet, a valved outlet, an ultrasonic level sensor removeably affixed to the external top surface of said shell for determining the amount of high purity chemical in said container and a diptube removably connected to said outlet through which high purity chemical can be dispensed from said container by connection to a downstream high purity chemical delivery system.
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13. A container for high purity chemicals comprising a metallic shell with an external surface comprising a top surface, a side surface and a bottom surface, a valved inlet, a valved outlet, an ultrasonic level sensor removeably affixed to the external bottom surface of said shell radially inside a skirt of said container and located above the plane defined by the bottom circumferential lower edge of said skirt, for determining the amount of high purity chemical in said container and a diptube removably connected to said outlet through which high purity chemical can be dispensed from said container by connection to a downstream high purity chemical delivery system.
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14. A container for high purity chemicals having a metallic shell with an external surface comprising a top surface, a side surface and a bottom surface, a valved inlet, a valved outlet, an ultrasonic level sensor removeably affixed to an external side surface of said shell for determining the amount of high purity chemical in said container and a diptube removably connected to said outlet through which high purity chemical can be dispensed from said container by connection to a downstream high purity chemical delivery system.
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15. A container for high purity liquid chemical having a metallic shell with an external surface comprising a top surface, a side surface and a bottom surface, a pneumatically valved inlet, a pneumatically valved outlet, a charge of high purity liquid chemical, an ultrasonic level sensor removeably affixed to an external surface of said shell for determining the amount of high purity chemical in said container and a diptube removably connected to said outlet through which high purity liquid chemical can be dispensed from said container by connection to a downstream high purity chemical delivery system.
Specification