Method and system for registering fiducials employing backlighting techniques

• US 20020109843A1
• Filed: 02/13/2001
• Published: 08/15/2002
• Est. Priority Date: 02/13/2001
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Hill, David R., Ehsani, Ali, McCarthy, Patrick
• Application Number:
  US09/782,887
• Publication Number:
  US 20020109843A1
• Time in Patent Office: Days
• US Class Current: 356/400
• CPC Class Codes: G01B 11/27 for testing the alignment of axes means for centering or aligning a light guide within a ferrule G02B6/3834

Abstract

A method and system to determine an alignment of a workpiece, with respect to a tool, by backlighting the workpiece. The workpiece includes fiducials, and the backlighting results in electromagnetic radiation passing through the fiducial. The electromagnetic energy emerging from the fiducial defines an emergent flux. A circumference of the emergent flux is ascertained, and the alignment is determined as a function of the circumference.

Claims

1. A method for determining an alignment of a workpiece with respect to a tool, said workpiece of the type having a fiducial, said method comprising:

passing electromagnetic energy through said fiducial, with electromagnetic energy emerging from said fiducial defining an emergent flux;

ascertaining a circumference said emergent flux; and

determining said alignment as a function of said circumference.

2. The method as recited in claim 1 wherein ascertaining said circumference further includes sensing, with a detector, an irradiance associated with said circumference, and determining said alignment further includes determining said alignment as a function of said irradiance.

3. The method as recited in claim 1 wherein said electromagnetic radiation passing through said fiducial produces artifacts having a radiant flux that includes information associated with said artifacts, with a first component of said emergent flux comprising of a sub-portion of said radiant flux and the remaining components of said emergent flux having information corresponding to said fiducial and further including attenuating information in said emergent flux associated with said artifacts.

4. The method as recited in claim 1 wherein said electromagnetic radiation passing through said fiducial produces artifacts having a radiant flux that includes information associated with said artifacts, with a first component of said emergent flux comprising of a sub-portion of said radiant flux and the remaining components of said emergent flux having information corresponding to said fiducial, with ascertaining said circumference further including attenuating information associated with said artifacts by sensing, with a detector, an irradiance associated with said emergent flux that is substantially uniform over an area of said detector.

5. The method as recited in claim 1 wherein said electromagnetic radiation passing through said fiducial produces artifacts having a radiant flux associated therewith, with a first component of said emergent flux comprising of a sub-portion of said radiant flux, wherein ascertaining said circumference includes sensing, with a detector having a detection area associated therewith, a first irradiance associated with said first component and a second irradiance associated with the remaining components of said emergent flux, said first and second irradiance defining a combined irradiance that is substantially uniform over said detection area.

6. The method as recited in claim 5 wherein determining said alignment further includes determining said alignment as a function of said combined irradiance.

7. The method as recited in claim 1 wherein said fiducial extends between opposed sides of said workpiece and has a cross-sectional area associated therewith which defines an aperture stop, with passing electromagnetic radiation further including defining said circumference with said aperture stop.

8. The method as recited in claim 1 wherein said electromagnetic radiation is in the range of 410 to 620 nm.

9. The method as recited in claim 1 wherein passing electromagnetic radiation further includes generating said electromagnetic radiation from an electroluminescent source.

10. A system for determining an alignment of a workpiece with respect to a tool, said workpiece of the type having a fiducial, said system comprising:

means for passing electromagnetic energy through said fiducial, with electromagnetic energy emerging from said fiducial defining an emergent flux;

means for ascertaining a circumference of said emergent flux; and

means for determining said position as a function of said circumference.

11. A system for determining an alignment of a workpiece with respect to a tool, said workpiece of the type having a fiducial, said system comprising:

a displacement mechanism including a platen;

an illumination subsystem coupled to said platen, said illumination system including an illumination source disposed to propagate electromagnetic radiation through said fiducial, with electromagnetic energy emerging from said fiducial defining an emergent flux; and

a detection subsystem in optical communication with said workpiece to detect said emergent flux.

12. The system as recited in claim 11 wherein said illumination source includes a plurality of strips of electromagnetic material extending along said platen, with a first subset of said plurality of strips extending along a first direction and a second subset of said plurality of strips extending along a second direction, transverse to said first direction.

13. The system as recited in claim 12 wherein said platen includes a surface with a plurality of vacuum grooves formed therein, with a first subgroup of said plurality of vacuum grooves extending along said a first direction and a second subgroup of said plurality of vacuum grooves extending along said second direction, with strips associated with said first subset being disposed between adjacent vacuum grooves associated with said first subgroup and strips associated with said second subset being disposed between adjacent vacuum grooves associated with said second subgroup.

14. The system as recited in claim 11 wherein said platen includes a surface, lying in a plane, with a recess form into said surface, with said illumination source being disposed within said recess and further including an optically transmissive body, having opposed sides, disposed in said recess with one of said opposed sides resting against said illumination source, with the remaining side lying in said plane.

15. The system as recited in claim 11 wherein said illumination source includes a strip of electroluminescent material having opposed sides and said platen includes a surface, lying in a plane, with a recess form into said surface and having a nadir, with said strip being disposed in said recess with one of said opposed sides resting against said nadir, with the remaining side lying in a plane in which said surface lies.

16. The system as recited in claim 11 wherein said platen is formed from a body of glass having first and second opposed surfaces, with said illumination source being disposed adjacent to said first surface, with said second surface having a plurality of vacuum grooves formed therein and disposed between said first surface and said detection system.

17. The system as recited in claim 16 wherein said first opposed surface has an area associated therewith, with said illumination source consisting essentially of electroluminescent material completely covering said area.

18. The system as recited in claim 11 wherein said illumination source is from a group of consisting essentially of electroluminescent material, light emitting diodes and laser emitters.

19. The system as recited in claim 14 wherein said body comprises a projection lens.

20. The system as recited in claim 11 further including a top-down-dark-field illumination system in optical communication with said platen.

21. The system as recited in claim 11 further including a top-down-bright-field illumination system in optical communication with said platen.

22. A system for determining an alignment of a workpiece with respect to a tool, said workpiece of the type having a fiducial, said system comprising:

an illumination subsystem in optical communication with said workpiece;

a detection subsystem in optical communication with said workpiece, with said workpiece being disposed between said detector and said illumination system, said fiducial extending between opposed sides of said workpiece; and

a displacement mechanism including a platen, with said illumination system being coupled to said platen and including electroluminescent material disposed so that said fiducial superimposes a sub-portion of said electroluminescent material, with said detection system being in optical communication with said displacement system.

23. The system as recited in claim 22 wherein said electroluminescent material includes a plurality of strips extending along said platen, with a first subset of said plurality of strips extending along a first direction and a second subset of said plurality of strips extending along a second direction, transverse to said first direction.

24. The system as recited in claim 23 wherein said platen includes a surface with a plurality of vacuum grooves formed therein, with a first subgroup of said plurality of vacuum grooves extending along said first direction and a second subgroup of said plurality of vacuum grooves extending along said second direction, with strips associated with said first subset being disposed between adjacent vacuum grooves associated with said first subgroup and strips associated with said second subset being disposed between adjacent vacuum grooves associated with said second subgroup.

25. The system as recited in claim 24 wherein said surface, lies in a plane, and includes a plurality of recesses, each of which includes one of said plurality of strips, and further including a plurality of bodies of glass, each of which has opposed sides and is disposed in one of said plurality of recesses with one of said opposed sides resting against said electroluminescent material and the remaining side lying in said plane.

26. The system as recited in claim 25 further including a memory and a processor, said processor being in data communication with said illumination, detection and displacement systems and said memory, with said memory having a computer-readable program embodied therein, said computer-readable program including a first set of instructions to control the illumination system to pass said electromagnetic energy through said fiducial, and a second set of instruction to control said detection system to ascertain a circumference of said emergent flux, and a third set of instructions operated on by said processor to determine said alignment as a function of said circumference.

27. The system as recited in claim 26 wherein said second set of instructions further includes a first subroutine operated on by said processor to sense an irradiance associated with said circumference with a detector, and said third set of instructions further includes a second subroutine to determine said alignment further includes determining said alignment as a function of said irradiance.