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Optical modulator, optical modulator manufacturing method, light information processing apparatus including optical modulator, image formation apparatus including optical modulator, and image projection and display appratus including optical modulator

  • US 20020109899A1
  • Filed: 01/18/2002
  • Published: 08/15/2002
  • Est. Priority Date: 01/18/2001
  • Status: Active Grant
First Claim
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1. A light modulator modulating light by changing a reflection direction of incident light, comprising:

  • a light reflection film regularly reflecting incident light;

    a center beam which is formed out of a thin film constituted to be combined with said light reflection film, which has both ends fixed, and which is deformed by an electronic force, said reflection film provided on one surface of said center beam;

    a substrate electrode which is opposed to said center beam through a gap formed on the other surface of said center beam;

    an opposed surface which is a surface of said substrate electrode opposed to said center beam modulating-the incident light on said light reflection film, said opposed surface restricting deformation of said center beam due to application of a driving voltage to said substrate electrode by abutting on said center beam; and

    a substrate which has said substrate electrode having said opposed surface, formed in a concave section, and which holds a to-be-held section of said center beam.

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