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Method and apparatus for providing high contrast imaging

  • US 20020111546A1
  • Filed: 02/08/2002
  • Published: 08/15/2002
  • Est. Priority Date: 11/05/1998
  • Status: Active Grant
First Claim
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1. An apparatus for detecting optical characteristics of a sub-surface object located at an object plane, comprising:

  • a light source for providing an illumination beam that propagates along an illumination path defined by said light source and the object, an illumination system that transforms said illumination beam into a high contrast illumination pattern and projects said illumination pattern onto the sub-surface object; and

    an imaging system that includes an image capturing device for detecting an image of the sub-surface object, said image being formed by scattered illumination from said high contrast illumination pattern that is transmitted through the sub-surface object and propagates along an image path to said image capturing device, said image path defined by the object and said image capturing means.

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