MEMS device having an actuator with curved electrodes

• US 20020113281A1
• Filed: 12/19/2001
• Published: 08/22/2002
• Est. Priority Date: 12/19/2000
• Status: Abandoned Application

• Current Assignee: Coventor, Inc. (Lam Research Corporation)
• Original Assignee: Coventor, Inc. (Lam Research Corporation)
• Inventors: Cunningham, Shawn Jay, DeReus, Dana R.
• Application Number:
  US10/025,974
• Publication Number:
  US 20020113281A1
• Time in Patent Office: Days
• US Class Current: 257/415
• CPC Class Codes: B81B 2201/038 Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: B81B 7/0067 for controlling the passage of optical signals through the package
• CPC Class Codes: B81C 1/00182 Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
• CPC Class Codes: B81C 2201/019 Bonding or gluing multiple substrate layers
• CPC Class Codes: B81C 2203/0109 Bonding an individual cap on the substrate
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 26/0866 the reflecting means being moved or deformed by thermal means
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/353 the optical element being a shutter, baffle, beam dump or opaque element absorbers on light guide termination G02B6/243
• CPC Class Codes: G02B 6/3548 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/356 in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001
• CPC Class Codes: G02B 6/3566 involving bending a beam, e.g. with cantilever
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3572 Magnetic force magnetic forces controlling reflecting elements in general G02B26/085; magneto-optic devices G02F1/09
• CPC Class Codes: G02B 6/3576 : Temperature or heat actuation thermal forces controlling reflecting elements in general G02B26/0866; thermo-optic devices G02F1/0147
• CPC Class Codes: G02B 6/3578 : Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131
• CPC Class Codes: G02B 6/3582 : Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
• CPC Class Codes: G02B 6/3584 : constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: H01H 2001/0052 : Special contact materials used for MEMS
• CPC Class Codes: H01L 2224/48091 : Arched
• CPC Class Codes: H01L 2924/00014 : the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

MEMS Device having an Actuator with Curved Electrodes. According to one embodiment of the present invention, an actuator is provided for moving an actuating device linearly. The actuator includes a substrate having a planar surface and an actuating device movable in a linear direction relative to the substrate. The actuator includes at least one electrode beam attached to the actuating device and having an end attached to the substrate. The electrode beam is flexible between the actuating device and the end of the electrode beam attached to the substrate. Furthermore, the actuator includes at least one electrode attached to the substrate. The electrode has a curved surface aligned in a position adjacent the length of the electrode beam, whereby the actuating device is movable in its substantially linear direction as the electrode beam moves in a curved fashion corresponding substantially to the curved surface of the electrode.

Claims

1. An actuator, comprising:

(a) a substrate having a surface;

(b) an actuating device movable in a substantially linear direction with respect to the substrate;

(c) at least one bendable electrode beam attached to the actuating device and having an end attached to the substrate, the electrode beam being flexible between the actuating device and the end of the electrode beam attached to the substrate; and

(d) at least one electrode attached to the substrate, the electrode having a curved surface aligned in a position adjacent the length of the electrode beam, whereby the actuating device is movable in the substantially linear direction as the electrode beam moves in a curved fashion corresponding substantially to the curved surface of the electrode.

2. The actuator of claim 1 wherein the actuating device includes an optical component for interacting with light transmitted along a light pathway.

3. The actuator of claim 2 wherein the optical component is a shutter.

4. The actuator of claim 1 wherein the electrode beam is attached to the substrate via an anchor.

5. The actuator of claim 1 wherein the electrode beam includes a flexure portion attached between the actuating device and the end of the electrode beam attached to the substrate.

6. The actuator of claim 5 wherein the flexure portion is a two-fold flexure.

7. The actuator of claim 5 wherein the flexure portion is a one-fold flexure.

8. The actuator of claim 5 wherein the flexure portion is a crab leg flexure.

9. The actuator of claim 1 wherein the electrode beam is substantially straight and positioned substantially perpendicular to the linear direction.

10. The actuator of claim 1 wherein a first position along the length of the curved surface is closer to the electrode beam than a second position along the length of the curved surface that is closer to the actuating device.

11. The actuator of claim 1 wherein the maximum distance separating the curved surface and the electrode beam is between 35 and 50 micrometers.

12. The actuator of claim 1 wherein the at least one electrode beam includes a first and second electrode beam, the first electrode beam attached to actuating device on a first side, the second electrode beam attached to actuating device on a second side that opposes the first side for translating motion of the curved electrode in the substantially linear direction.

13. The actuator of claim 1 further including at least one electrically-isolated bumper attached to the substrate at a position in the path of movement between the electrode beam and the electrode for preventing the electrode beam and the electrode from shunting.

15. The actuator of claim 14 wherein the actuating device includes an optical component for interacting with light transmitted along a light pathway substantially perpendicular to the first and second linear directions.

16. The actuator of claim 14 wherein the optical component is a shutter.

17. The actuator of claim 14 wherein the electrode beam includes a flexure portion.

18. The actuator of claim 17 wherein the flexure portion is a two-fold flexure.

19. The actuator of claim 17 wherein the electrode beam is substantially straight and positioned substantially perpendicular to the first and second direction.

20. The actuator of claim 17 wherein a first position along the length of the curved surface of the first electrode is closer to the electrode beam than a second position along the length of the curved surface of the first electrode that is closer to the actuating device.

21. The actuator of claim 14 wherein a first position along the length of the curved surface of the second electrode is closer to the electrode beam than a second position along the length of the curved surface of the second electrode that is closer to the actuating device.

22. The actuator of claim 14 wherein the at least one electrode beam includes at least two electrode beams.

25. The method of claim 24 wherein the electrode beam includes a flexure portion attached between the actuating device and the end of the electrode beam attached to the substrate.

14. An actuator, comprising:

(a) a substrate having a surface;

(b) an actuating device movable in a substantially linear first direction and a substantially linear second direction with respect to the substrate;

(c) at least one bendable electrode beam attached to the actuating device and having an end attached to the substrate, the electrode beam being flexible between the actuating device and the end of the electrode beam attached to the substrate;

(d) at least one first electrode attached to the substrate, the electrode having a curved surface aligned in a position adjacent the length of the electrode beam, whereby the actuating device is movable in its substantially linear first direction as the electrode beam moves in a curved fashion corresponding substantially to the curved surface of the first electrode; and

(e) at least one second electrode attached to the substrate, the electrode having a curved surface aligned in a position adjacent the length of the electrode beam, whereby the actuating device is movable in its substantially linear second direction as the electrode beam moves in a curved fashion corresponding substantially to the curved surface of the first electrode.

23. An actuator, comprising:

(a) a substrate having a surface;

(b) an actuating device movable in a substantially linear direction with respect to the substrate;

(c) at least one bendable first electrode beam having an end attached to the substrate;

(d) at least one bendable second electrode beam attached to the first electrode beam and having an end attached to the actuating device, the electrode beam being flexible between the actuating device and the end of the electrode beam attached to the first electrode beam;

(e) at least one first electrode attached to the substrate, the electrode having a curved surface aligned in a position adjacent the length of the first electrode beam, whereby the actuating device is movable in its substantially linear direction as the first electrode beam moves in a curved fashion corresponding substantially to the curved surface of the first electrode;

(f) at least one second electrode attached to the substrate, the electrode having a curved surface aligned in a position adjacent the length of the second electrode beam, whereby the actuating device is movable in its substantially linear direction as the second electrode beam moves in a curved fashion corresponding substantially to the curved surface of the second electrode after the first electrode beam moves in a curved fashion corresponding substantially to the curved surface of the first electrode.

24. A method for moving an actuating device in a linear direction, comprising:

(a) providing a substrate having a surface;

(b) providing an actuating device movable in a substantially linear direction with respect to the substrate;

(c) providing at least one bendable electrode beam attached to the actuating device and having an end attached to the substrate, the electrode beam being flexible between the actuating device and the end of the electrode beam attached to the substrate;

(d) providing at least one electrode attached to the substrate, the electrode having a curved surface aligned in a position adjacent the length of the electrode beam; and

(e) applying a voltage across the electrode beam and curved electrode to move the electrode beam in a curved fashion corresponding to the curved surface of the electrode, whereby the actuating device moves in a substantially linear direction.