Micromirror device and projector employing the same
First Claim
1. A micromirror device for driving a micromirror, the micromirror device comprising:
- a substrate;
electrodes on the substrate;
first posts; and
a support frame supported by the first posts and tilting with respect to rotation axes using portions supported by each of the first posts as hinge points.
1 Assignment
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Accused Products
Abstract
A projector includes a light source emitting a light beam and a light beam splitting unit splitting the light beam from the light source according to a wavelength region of the light beam and transmitting and/or reflecting the light beam split at different angles. A micromirror device forms an image by independently pivoting a micromirror in a predetermined direction and angle and controlling the micromirror to selectively reflect the light beam, the micromirror tilting with respect to rotation axes. A projection lens unit magnifies and transmits an incident light beam from the micromirror devices to proceed to a screen to form the image.
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Citations
45 Claims
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1. A micromirror device for driving a micromirror, the micromirror device comprising:
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a substrate;
electrodes on the substrate;
first posts; and
a support frame supported by the first posts and tilting with respect to rotation axes using portions supported by each of the first posts as hinge points. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 36, 37, 38)
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17. A micromirror device for driving a micromirror, the micromirror device comprising:
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a substrate;
electrodes on the substrate;
first posts; and
a support frame supported by the first posts and tilting with respect to two rotation axes using portions supported by each of the first posts as hinge points, wherein the micromirror device excludes a color wheel.
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18. A projector, comprising:
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a light source emitting a light beam;
a light beam splitting unit splitting the light beam from the light source according to a wavelength region of the light beam and transmitting and/or reflecting the light beam split at different angles;
micromirrors;
micromirror devices forming an image by independently pivoting each of the micromirrors in a predetermined direction and angle and controlling the micromirrors to selectively reflect the split light beam, each of the micromirrors tilting with respect to rotation axes;
a screen; and
a projection lens unit magnifying and transmitting an incident light beam from the micromirror devices to proceed to the screen to form the image.
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35. A micromirror device for driving a micromirror, the micromirror device comprising:
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a substrate comprising a built-in SRAM;
electrodes on the substrate to tilt the micromirror;
at least three posts on the substrate; and
a support frame supported by the posts, wherein the micromirror is tilted in four directions by interaction with the electrodes.
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39. A micromirror device, comprising:
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a micromirror receiving a red light beam, a green light beam, and a blue light beam at different angles, and a projection lens unit selectively receiving and displaying each of the red, green, and blue light beams according to incident angles of each of the red, green, and blue light beams and a tilt angle of the micromirror corresponding to each of the incident angles to realize color.
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40. A micromirror device for driving a micromirror, the micromirror device comprising:
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a substrate;
electrodes on the substrate; and
a support frame supported by tilting with respect to rotation axes, wherein the micromirror tilts in four directions by applying a voltage to any one of the electrodes; and
a projection lens unit selectively displaying red, green, and blue colors according to a direction of tilt of the micromirror. - View Dependent Claims (41, 42, 43, 44, 45)
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Specification