Micromechanical device recoat methods
First Claim
1. A method of fabricating a micromechanical device, the method comprising:
- forming at least two micromechanical devices on a common substrate;
applying a liquid overcoat material to said micromechanical devices;
separating said common substrate to separate said devices; and
removing said overcoat from said micromechanical devices.
1 Assignment
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Accused Products
Abstract
A method of fabricating a micromechanical device. Several of the micromechanical devices are fabricated 20 on a common wafer. After the devices are fabricated, the sacrificial layers are removed 22 leaving open spaces where the sacrificial layers once were. These open spaces allow for movement of the components of the micromechanical device. The devices optionally are passivated 24, which may include the application of a lubricant. After the devices have been passivated, they are tested 26 in wafer form. After testing 26, any surface treatments that are not compatible with the remainder of the processing steps are removed 28. The substrate wafer containing the completed devices receives a conformal overcoat 30. The overcoat layer is thick enough to project the micromechanical structures, but thin and light enough to prevent deforming the underlying micromechanical structures. Once the devices on the wafer are overcoated, the wafer is separated 32, and the known good devices are cleaned 34 to remove debris left by the dicing process. Once the devices are separated and cleaned, the overcoat may be removed, however, the overcoat typically is left in place to protect the device during the initial stages of the packaging process. Typically the devices are mounted 36 in the package substrate, the overcoat removed 38 from the devices, and the package containing the micromechanical device finished by sealing the package to enclose the device.
21 Citations
45 Claims
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1. A method of fabricating a micromechanical device, the method comprising:
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forming at least two micromechanical devices on a common substrate;
applying a liquid overcoat material to said micromechanical devices;
separating said common substrate to separate said devices; and
removing said overcoat from said micromechanical devices. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 20, 21, 22, 23, 24, 25, 27, 28, 29, 30, 31)
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19. A method of fabricating a micromechanical device, the method comprising:
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forming at least two micromechanical devices on a common substrate;
immersing said common substrate in a liquid overcoat material to coat said micromechanical devices;
separating said common substrate to separate said devices; and
removing said overcoat from said micromechanical devices.
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26. A method of fabricating a micromechanical device, the method comprising:
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forming at least two micromechanical devices on a common substrate;
spraying a liquid overcoat material onto said common substrate to coat said micromechanical devices;
separating said common substrate to separate said devices; and
removing said overcoat from said micromechanical devices.
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32. A method of fabricating a micromechanical device, the method comprising:
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forming at least two micromechanical devices on a common substrate;
nebulizing a liquid overcoat material;
spraying said nebulized liquid overcoat material onto said common substrate to coat said micromechanical devices;
separating said common substrate to separate said devices; and
removing said overcoat from said micromechanical devices. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39)
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40. A method of fabricating a micromechanical device, the method comprising:
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forming at least two micromechanical devices on a common substrate;
dispensing droplets of a liquid overcoat material from a nozzle using a heated droplet dispenser;
depositing said droplets onto said common substrate to coat said micromechanical devices;
separating said common substrate to separate said devices; and
removing said overcoat from said micromechanical devices. - View Dependent Claims (41, 42, 43, 44, 45)
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Specification
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- Resources
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Current AssigneeTexas Instruments, Inc.
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Original AssigneeTexas Instruments, Inc.
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InventorsKnipe, Richard L., Jacobs, Simon Joshua, Kaeriyama, Toshiyuki, Mignardi, Michael A.
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Application NumberUS10/038,791Publication NumberTime in Patent OfficeDaysField of SearchUS Class Current427/58CPC Class CodesB05D 1/005 Spin coatingB05D 1/02 performed by sprayingB81C 1/00896 Temporary protection during...B81C 2201/053 Depositing a protective layers
