Light emitting diodes including modifications for light extraction and manufacturing methods therefor
First Claim
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1. A light emitting diode comprising:
- a substrate having first and second opposing faces, that is transparent to optical radiation in a predetermined wavelength range and that is patterned to define, in cross-section, a plurality of pedestals that extend into the substrate from the first face towards the second face; and
a diode region on the second face that is configured to emit light in the predetermined wavelength range into the substrate that is transparent to optical radiation in the predetermined wavelength range, upon application of voltage across the diode region.
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Abstract
Light emitting diodes include a substrate having first and second opposing faces and that is transparent to optical radiation in a predetermined wavelength range and that is patterned to define, in cross-section, a plurality of pedestals that extend into the substrate from the first face towards the second face. A diode region on the second face is configured to emit light in the predetermined wavelength range, into the substrate upon application of voltage across the diode region. A mounting support on the diode region, opposite the substrate is configured to support the diode region, such that the light that is emitted from the diode region into the substrate, is emitted from the first face upon application of voltage across the diode region. The first face of the substrate may include therein a plurality of grooves that define the plurality of triangular pedestals in the substrate. The grooves may include tapered sidewalls and/or a beveled floor. The first face of the substrate also may include therein an array of via holes. The via holes may include tapered sidewalls and/or a floor.
497 Citations
148 Claims
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1. A light emitting diode comprising:
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a substrate having first and second opposing faces, that is transparent to optical radiation in a predetermined wavelength range and that is patterned to define, in cross-section, a plurality of pedestals that extend into the substrate from the first face towards the second face; and
a diode region on the second face that is configured to emit light in the predetermined wavelength range into the substrate that is transparent to optical radiation in the predetermined wavelength range, upon application of voltage across the diode region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 35, 36, 37, 38, 40, 41, 42, 43, 44, 45, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61)
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34. A light emitting diode comprising:
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a substrate having first and second opposing faces, the first face having smaller surface area than the second face; and
a diode region on the second face, the diode region including an emission region that is confined to within the smaller surface area of the first face.
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39. A light emitting diode comprising:
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a substrate having first and second opposing faces, the first face having smaller surface area than the second face;
a diode region on the second face; and
a mounting support on the diode region, opposite the substrate.
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46. A light emitting diode comprising:
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a substrate;
a diode region on the substrate; and
a contact structure on one of the substrate and the diode region, the contact structure comprising;
an ohmic and reflector region on the one of the substrate and the diode region;
a barrier region on the ohmic and reflector region, opposite the one of the substrate and the diode region; and
a bonding region on the barrier region, opposite the ohmic and reflector region.
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62. A light emitting diode comprising:
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a substrate having first and second opposing faces, the first face having smaller surface area than the second face;
a diode region on the second face;
a first ohmic layer on the first face opposite the diode region;
an adhesion layer on the first ohmic layer opposite the substrate;
a first barrier layer on the adhesion layer opposite the first ohmic layer;
a first bonding layer on the first barrier layer opposite the adhesion layer;
a second ohmic layer on the diode region opposite the substrate;
a reflector layer on the second ohmic layer, opposite the diode region;
a second barrier layer on the reflector layer opposite the second ohmic layer; and
a second bonding layer on the second barrier layer opposite the reflector layer. - View Dependent Claims (63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73)
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74. A light emitting diode comprising:
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a substrate having first and second opposing faces, the first face having smaller surface area than the second face;
a diode region on the second face;
a first layer comprising silver and/or aluminum on the first face opposite the diode region;
a second layer comprising titanium on the first layer opposite the substrate;
a third layer comprising platinum on the second layer opposite the first layer;
a fourth layer comprising gold on the third layer opposite the second layer;
a fifth layer comprising nickel/gold, nickel oxide/gold, nickel oxide/platinum, titanium and/or titanium/gold on the diode region opposite the substrate;
a sixth layer comprising silver and/or aluminum on the fifth layer, opposite the diode region;
a seventh layer comprising nickel, nickel/vanadium and/or titanium/tungsten on the sixth layer opposite the fifth layer; and
a eighth layer comprising gold, indium, solder and/or braze on the seventh layer opposite the sixth layer. - View Dependent Claims (75)
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76. A light emitting diode comprising:
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a substrate having first and second opposing faces, the first face having smaller surface area than the second face;
a diode region on the second face;
a first adhesion layer on the first face opposite the diode region;
a first barrier layer on the first adhesion layer opposite the substrate;
a first bonding layer on the first barrier layer opposite the first adhesion layer;
an ohmic layer on the diode region opposite the substrate;
a reflector layer on the ohmic layer opposite the diode region;
a second adhesion layer on the reflector layer opposite the ohmic layer;
a second barrier layer on the second adhesion layer opposite the reflector layer; and
a second bonding layer on the second barrier layer opposite the second adhesion layer. - View Dependent Claims (77, 78, 79, 80, 81, 82, 83, 84, 85, 86)
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87. A light emitting diode comprising:
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a substrate having first and second opposing faces, the first face having smaller surface area than the second face;
a diode region on the second face;
a first layer comprising titanium on the first face opposite the diode region;
a second layer comprising platinum on the first layer opposite the substrate;
a third layer comprising gold on the second layer opposite the first layer;
a fourth layer comprising nickel/gold, nickel oxide/gold, nickel oxide/platinum, titanium and/or titanium/gold on the diode region opposite the substrate;
a fifth layer comprising silver and/or aluminum on the fourth layer opposite the diode region;
a sixth layer comprising titanium on the fifth layer opposite the fourth layer;
a seventh layer comprising platinum on the sixth layer opposite the fifth layer; and
an eighth layer comprising gold on the seventh layer opposite the sixth layer.
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- 88. A light emitting diode according to claim 88 further comprising a mounting support on the third layer opposite the second layer.
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89. A light emitting diode comprising:
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a compensated, colorless silicon carbide substrate having first and second opposing faces; and
a gallium nitride-based diode region on the second face that is configured to emit light into the substrate upon application of voltage across the diode region.
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121. A light emitting diode comprising:
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a substrate having first and second opposing faces;
a gallium nitride-based diode region on the second face that is configured to emit light into the substrate, upon application of voltage across the diode region; and
means for extracting from the substrate, at least some of the light that is emitted into the substrate by the diode region.
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124. A method of manufacturing a light emitting diode comprising:
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forming a diode region that is configured to emit light in a predetermined wavelength range on a second face of a substrate having first and second opposing faces and that is transparent to the optical radiation in the predetermined wavelength range; and
patterning the substrate to define, in cross-section, a plurality of pedestals that extend into the substrate from the first face towards the second face.
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Specification
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Current AssigneeCREE Led Incorporated (Smart Global Holdings Incorporated)
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Original AssigneeCREE Incorporated (Wolfspeed, Inc.)
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InventorsIbbetson, James, Swoboda, Charles M., Keller, Bernd, Slater, David B. Jr., Tarsa, Eric J., Thibeault, Brian, Glass, Robert C.
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Granted Patent
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Time in Patent OfficeDays
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Field of Search
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US Class Current438/39
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CPC Class CodesH01L 2224/32014 the layer connector being s...H01L 2224/48091 ArchedH01L 2224/73265 Layer and wire connectorsH01L 2924/00 Indexing scheme for arrange...H01L 2924/00014 the subject-matter covered ...H01L 2924/01079 Gold [Au]H01L 2924/01322 Eutectic Alloys, i.e. obtai...H01L 2924/10253 Silicon [Si]H01L 2924/12032 Schottky diodeH01L 2924/12041 LEDH01L 33/10 with a light reflecting str...H01L 33/20 with a particular shape, e....H01L 33/405 Reflective materialsH01L 33/60 Reflective elementsH01L 33/62 Arrangements for conducting...
