Process monitoring device for sample processing apparatus and control method of sample processing apparatus
First Claim
1. A process monitoring device comprising:
- a monitor data acquisition section for acquiring a plurality of monitor data relating to a processing state of one sample in a processing apparatus, via sensors;
a data selection section for selecting monitor data belonging to an arbitrary processing division included in a plurality of processing divisions for said sample, from among said plurality of monitor data;
a monitoring signal generation section for generating monitoring signals based on the monitor data belonging to said arbitrary processing division selected by said data selection section; and
a display setting controller for displaying a plurality of said monitoring signals obtained with respect to samples processed in said processing apparatus, on a display section in a time series manner.
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Accused Products
Abstract
A monitor data acquisition section acquires a plurality of monitor data relating to a processing state of one sample in a processing apparatus, via sensors. A data selection section selects monitor data belonging to an arbitrary processing division included in a plurality of processing divisions for the sample, from among the plurality of monitor data. A monitoring signal generation section generates monitoring signals based on the monitor data belonging to the arbitrary processing division selected by the data selection section. A display setting controller displays a plurality of monitoring signals obtained with respect to samples processed in the processing apparatus, on a display section in a time series manner.
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Citations
27 Claims
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1. A process monitoring device comprising:
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a monitor data acquisition section for acquiring a plurality of monitor data relating to a processing state of one sample in a processing apparatus, via sensors;
a data selection section for selecting monitor data belonging to an arbitrary processing division included in a plurality of processing divisions for said sample, from among said plurality of monitor data;
a monitoring signal generation section for generating monitoring signals based on the monitor data belonging to said arbitrary processing division selected by said data selection section; and
a display setting controller for displaying a plurality of said monitoring signals obtained with respect to samples processed in said processing apparatus, on a display section in a time series manner. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 15, 16, 18, 19, 20, 21, 22, 23, 24, 25)
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13. A process monitoring device comprising:
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a monitor data acquisition section for acquiring a plurality of monitor data relating to a processing state of one sample in a processing apparatus, via sensors;
a data selection section for selecting monitor data belonging to an arbitrary processing division included in a plurality of processing divisions for said sample, from among said plurality of monitor data;
a monitoring signal generation section for generating monitoring signals based on the monitor data belonging to said arbitrary processing division selected by said data selection section;
a display setting controller for displaying a plurality of said monitoring signals obtained with respect to samples processed in said processing apparatus, on a display section in a time series manner; and
a display switchover section for switching over the display according to a use situation of said processing apparatus.
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14. A process monitoring device comprising:
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a monitor data acquisition section for acquiring a plurality of monitor data relating to a processing state of one sample in a processing apparatus, via sensors;
a monitoring signal generation section for extracting fewer monitoring signals than the number of monitored data, from among said plurality of monitor data by working said monitor data; and
a display setting controller for displaying a plurality of said monitoring signals obtained with respect to samples processed in said processing apparatus, on a display section in a time series manner.
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17. A control method of a sample processing apparatus having a process monitoring device for acquiring a plurality of monitor data relating to a processing state of a sample, via sensors, said control method comprising the steps of:
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a) acquiring a plurality of monitor data relating to a processing state of one sample in said processing apparatus, via sensors;
b) selecting monitor data belonging to an arbitrary processing division included in a plurality of processing divisions for said sample, from among said plurality of monitor data;
c) generating monitoring signals based on the monitor data belonging to said selected arbitrary processing division; and
d) controlling sample processing by utilizing said monitoring signals.
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26. A sample manufacturing method comprising the steps of:
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acquiring monitor data concerning a processing state of one sample from a sample processing apparatus via sensors;
selecting monitor data belonging to an arbitrary processing division included in a plurality of processing divisions for said sample, from among said monitor data;
generating monitoring signals by working said selected monitor data; and
conducting processing control of said sample by using said monitoring signals and conducting sample manufacturing.
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27. A sample manufacturing method comprising the steps of:
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acquiring a plurality of monitor data concerning a processing state of one sample in a sample processing apparatus, via sensors;
extracting and generating fewer monitoring signals than the number of monitored data from said plurality of monitor data, by working said monitor data; and
conducting processing control of said sample by using said generated monitoring signals and conducting sample manufacturing.
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Specification