Matrix substrate, liquid crystal display device using it, and method for producing the matrix substrate

• US 20020126233A1
• Filed: 05/13/2002
• Published: 09/12/2002
• Est. Priority Date: 10/24/1997
• Status: Active Grant

• Current Assignee: Katsumi Kurematsu, Koichi Yamagishi, Osamu Koyama, Toru Nakazawa
• Original Assignee: Katsumi Kurematsu, Koichi Yamagishi, Osamu Koyama, Toru Nakazawa
• Inventors: Nakazawa, Toru, Koyama, Osamu, Kurematsu, Katsumi, Yamagishi, Koichi
• Granted Patent: US 6,809,790 B2
• Time in Patent Office: Days
• US Class Current: 349/43
• CPC Class Codes: G02F 1/136213 Storage capacitors associated with the pixel electrode
• CPC Class Codes: G02F 1/136227 Through-hole connection of the pixel electrode to the active element through an insulation layer
• CPC Class Codes: G02F 1/136277 formed on a semiconductor substrate, e.g. of silicon

Abstract

A matrix substrate having, on a substrate, a plurality of electroconductive members to constitute pixel electrodes arrayed in a matrix pattern, and an electrically insulating member comprising a projecting region disposed between the electroconductive members to separate the pixel electrodes from each other, wherein a metal material having a higher melting point than that of the electroconductive members is placed at the base of the projecting region.

Claims

1. A matrix substrate having, on a substrate, a plurality of electroconductive members to constitute pixel electrodes arrayed in a matrix pattern, and an electrically insulating member comprising a projecting region disposed between said electroconductive members to separate the pixel electrodes from each other, wherein a metal material having a higher melting point than that of said electroconductive members is placed at the base of said projecting region.

2. The matrix substrate according to claim 1, wherein said electroconductive members to constitute the pixel electrodes are comprised of a material whose principal component is one selected from Al, AlSi, AlSiCu, AlGeCu, AlC, Cr, Au, and Ag.

3. The matrix substrate according to claim 2, wherein said metal material having the higher melting point is comprised of a material whose principal component is one selected from Ti, W, Pt, Au, and TiN.

4. The matrix substrate according to claim 1, wherein said electrically insulating member is comprised of a material containing Si atoms.

5. The matrix substrate according to claim 1, wherein a corner portion is removed from a top part of said projecting region.

6. A matrix substrate having, on a substrate, a plurality of electroconductive members to constitute pixel electrodes arrayed in a matrix pattern, an electrically insulating member disposed between the electroconductive members to separate the pixel electrodes from each other, and an electroconductive film disposed through a first electrically insulating film with respect to said electroconductive members to create a capacitor with each of said electroconductive members,

wherein a second electrically insulating film is further disposed between said electrically insulating member and said electroconductive film and between said electrically insulating film and said electroconductive film.

8. The matrix substrate according to claim 6, wherein near a contact portion between said electrically insulating member and said second insulating film, said electrically insulating member is formed in a round taper shape.

9. The matrix substrate according to claim 6 or 7, wherein said electroconductive film functions as a shielding film.

7. A matrix substrate having, on a substrate, a plurality of electroconductive members to constitute pixel electrodes arrayed in a matrix pattern, an electrically insulating member disposed between the electroconductive members to separate the pixel electrodes from each other, and an electroconductive film disposed through an electrically insulating film with respect to said electroconductive members to create a capacitor with each of said electroconductive members,

wherein said electrically insulating member exists immediately over said electroconductive film and said electrically insulating member is formed in a round taper shape near a contact portion therewith.

10. A liquid crystal display device adapted so that a liquid crystal material is placed between a matrix substrate, said matrix substrate having, on a substrate, a plurality of electroconductive members to constitute pixel electrodes arrayed in a matrix pattern, and an electrically insulating member comprising a projecting region disposed between said electroconductive members to separate the pixel electrodes from each other, and an opposite substrate having an opposite electrode opposed to said pixel electrodes,

wherein a metal material having a higher melting point than that of said electroconductive members is placed at the base of said projecting region.

11. The liquid crystal display device according to claim 10, wherein said electroconductive members to constitute the pixel electrodes are comprised of a material whose principal component is one selected from Al, AlSi, AlSiCu, AlGeCu, AlC, Cr, Au, and Ag.

12. The liquid crystal display device according to claim 11, wherein said metal material having the higher melting point is comprised of a material whose principal component is one selected from Ti, W, Pt, Au, and TiN.

13. The liquid crystal display device according to claim 10, wherein said electrically insulating member is comprised of a material containing Si atoms.

14. The liquid crystal display device according to claim 10, wherein a corner portion is removed from a top part of said projecting region.

15. The liquid crystal display device according to claim 10, said liquid crystal display device comprising a plurality of microlenses.

16. The liquid crystal display device according to claim 15, wherein one of said microlenses is disposed in correspondence to two of said pixel electrodes.

17. A projection type liquid crystal display device comprising the liquid crystal display device as set forth in claim 10.

18. The projection type liquid crystal display device according to claim 17, comprising at least three said liquid crystal devices for three colors, wherein a blue beam is separated by a highly reflective mirror and a blue reflecting dichroic mirror and beams of red and green are separated by a red reflecting dichroic mirror and a green/blue reflecting dichroic mirror, so that each beam irradiates the corresponding liquid crystal device.

21. The liquid crystal display device according to claim 19, wherein near a contact portion between said electrically insulating member and said second insulating film, said electrically insulating member is formed in a round taper shape.

22. The liquid crystal display device according to claim 19, said liquid crystal display device comprising a plurality of microlenses.

23. The liquid crystal display device according to claim 22, wherein one of said microlenses is disposed in correspondence to two of said pixel electrodes.

24. A projection type liquid crystal display device comprising the liquid crystal display device as set forth in claim 19.

25. The projection type liquid crystal display device according to claim 24, comprising at least three said liquid crystal devices for three colors, wherein a blue beam is separated by a highly reflective mirror and a blue reflecting dichroic mirror and beams of red and green are separated by a red reflecting dichroic mirror and a green/blue reflecting dichroic mirror, so that each beam irradiates the corresponding liquid crystal device.

27. The liquid crystal display device according to claim 26, wherein one of said microlenses is disposed in correspondence to two of said pixel electrodes.

29. The projection type liquid crystal display device according to claim 28, comprising at least three said liquid crystal devices for three colors, wherein a blue beam is separated by a highly reflective mirror and a blue reflecting dichroic mirror and beams of red and green are separated by a red reflecting dichroic mirror and a green/blue reflecting dichroic mirror, so that each beam irradiates the corresponding liquid crystal device.

19. A liquid crystal display device adapted so that a liquid crystal material is placed between a matrix substrate, said matrix substrate having, on a substrate, a plurality of electroconductive members to constitute pixel electrodes arrayed in a matrix pattern, an electrically insulating member disposed between the electroconductive members to separate the pixel electrodes from each other, and an electroconductive film disposed through a first electrically insulating film with respect to said electroconductive members to create a capacitor with each of said electroconductive members, and an opposite substrate having an opposite electrode opposed to said pixel electrodes,

wherein a second electrically insulating film is further disposed between said electrically insulating member and said electroconductive film and between said electrically insulating film and said electroconductive film.

20. A liquid crystal display device adapted so that a liquid crystal material is placed between a matrix substrate, said matrix substrate having, on a substrate, a plurality of electroconductive members to constitute pixel electrodes arrayed in a matrix pattern, an electrically insulating member disposed between the electroconductive members to separate the pixel electrodes from each other, and an electroconductive film disposed through an electrically insulating film with respect to said electroconductive members to create a capacitor with each of said electroconductive members, and an opposite substrate having an opposite electrode opposed to said pixel electrodes,

wherein said electrically insulating member exists immediately over said electroconductive film and said electrically insulating member is formed in a round taper shape near a contact portion therewith.

26. The liquid crystal display device according to claim 20, said liquid crystal display device comprising a plurality of microlenses.

28. A projection type liquid crystal display device comprising the liquid crystal display device as set forth in claim 20.

30. A method for producing a matrix substrate, said method comprising a step of forming apertures in a matrix pattern in portions corresponding to pixel electrode forming portions in an electrically insulating layer on a substrate, a step of depositing a metal layer having a higher melting point than that of a material for forming pixel electrodes and thereafter removing said metal layer having the higher melting point by etching except for corners at bottoms of the apertures, a step of depositing an electroconductive material for forming the pixel electrodes, and a step of flattening the electroconductive material so as to expose surfaces of the insulating layer between said pixel electrode forming portions, to form the pixel electrodes separated from each other by the insulating layer.

31. A method for producing a matrix substrate, said method comprising a step of forming apertures in a matrix pattern in portions corresponding to pixel electrode forming portions in an electrically insulating layer on a substrate, a step of removing corners at top portions of the insulating layer between the pixel electrode forming portions by etching, a step of depositing an electroconductive material for forming pixel electrodes, and a step of flattening the electroconductive material so as to expose surfaces of the insulating layer between said pixel electrode forming portions, to form the pixel electrodes separated from each other by the insulating layer.

32. A method for producing a matrix substrate, said method comprising a step of forming apertures in a matrix pattern in portions corresponding to pixel electrode forming portions in an electrically insulating layer on a substrate, a step of depositing a metal layer having a higher melting point than that of a material for forming pixel electrodes, thereafter removing said metal layer having the higher melting point by etching except for corners at bottoms of the apertures, and also removing corners at top portions of the insulating layer between the pixel electrode forming portions, a step of depositing an electroconductive material for forming the pixel electrodes, and a step of flattening the electroconductive material so as to expose surfaces of the insulating layer between said pixel electrode forming portions, to form the pixel electrodes separated from each other by the insulating layer.