Optical multilayer structure material and process for producing the same, light switching device, and image display apparatus
First Claim
1. An optical multilayer structure material comprising an optical thin film having a bridge structure on a substrate through a gap portion having a size that enables an interference phenomenon to occur, wherein an amount of a light which reflects off, is transmitted by, or is absorbed by said optical thin film is changed depending on displacement of said optical thin film in a direction perpendicular to said substrate, said optical thin film comprising a movable portion, and a supporting portion for uniformly supporting a circumference of said movable portion by surrounding said gap portion.
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Accused Products
Abstract
An optical multilayer structure material has a structure such that, on a substrate, a conductive layer in contact with the substrate, a gap portion having a size that enables an interference phenomenon to occur and can be changed, and an optical thin film are formed in this order. The circumference of a movable portion in the optical thin film is uniformly supported by supporting portions, suppressing generation of strain due to an internal stress. Through holes are formed in the movable portion to allow an etchant to easily reach a sacrifice layer when forming a gap portion by etching for sacrifice layer. There is provided an optical multilayer structure material having a simple construction, which can suppress generation of strain due to an internal stress and can be advantageously used in an image display apparatus.
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Citations
18 Claims
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1. An optical multilayer structure material comprising an optical thin film having a bridge structure on a substrate through a gap portion having a size that enables an interference phenomenon to occur, wherein an amount of a light which reflects off, is transmitted by, or is absorbed by said optical thin film is changed depending on displacement of said optical thin film in a direction perpendicular to said substrate,
said optical thin film comprising a movable portion, and a supporting portion for uniformly supporting a circumference of said movable portion by surrounding said gap portion.
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13. A process for producing an optical multilayer structure material which comprises an optical thin film having a bridge structure on a substrate through a gap portion having a size that enables an interference phenomenon to occur, wherein an amount of a light which reflects off, is transmitted by, or is absorbed by said optical thin film is changed depending on displacement of said optical thin film in a direction perpendicular to said substrate,
said process comprising the steps of: -
forming, on a substrate, a pattern for a sacrifice layer having a predetermined thickness, and forming an optical thin film so that the optical thin film covers a surface and a sidewall portion of said sacrifice layer and has a through hole for etching which reaches said sacrifice layer; and
subjecting the optical thin film to etching via said through hole to selectively remove said sacrifice layer, and forming, in said optical thin film, a movable portion and a supporting portion for uniformly supporting a circumference of said movable portion by surrounding said gap portion.
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15. A light switching device comprising:
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an optical multilayer structure material which comprises an optical thin film having a bridge structure on a substrate through a gap portion having a size that enables an interference phenomenon to occur, wherein an amount of a light which reflects off, is transmitted by, or is absorbed by said optical thin film is changed depending on displacement of said optical thin film in a direction perpendicular to said substrate; and
driving means for changing the optical size of said gap portion in said optical multilayer structure material, wherein;
said optical thin film comprising a movable portion, and a supporting portion for uniformly supporting a circumference of said movable portion by surrounding said gap portion.
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18. An image display apparatus for displaying a two-dimensional image by irradiating with a light a plurality of light switching devices which are one-dimensionally or two-dimensionally arranged,
each of said light switching devices comprising: -
an optical multilayer structure material which comprises an optical thin film having a bridge structure on a substrate through a gap portion having a size that enables an interference phenomenon to occur, wherein the amount of a light which reflects off, is transmitted by, or is absorbed by said optical thin film is changed depending on the displacement of said optical thin film in a direction perpendicular to said substrate; and
driving means for changing the optical size of said gap portion in said optical multilayer structure material, said optical thin film comprising a movable portion, and a supporting portion for uniformly supporting a circumference of said movable portion by surrounding said gap portion.
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Specification