Tiled microelectromechanical device modules and fabrication methods
First Claim
1. A microelectromechanical (MEM) module comprising:
- a plurality of MEM device substrates, each of which includes at least one MEM device thereon;
a base substrate including a face; and
a mounting structure that is configured to mount the plurality of MEM device substrates on the face.
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Abstract
Multiple microelectromechanical (MEM) device substrates, such as MEM mirror substrates, are tiled on a base substrate. Each MEM device substrate can include one or more MEM devices such as mirrors. By including one or a relatively small number of devices on a MEM device substrate, the MEM device substrate can be manufactured with relatively high yield and can be tested prior to tiling onto the base substrate. The separate MEM device substrates and base substrate can also reduce crosstalk and/or other signal interference which could degrade MEM device operation. Solder bumps and/or other mounting techniques may be used to mount the MEM device substrates onto the base substrate.
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Citations
20 Claims
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1. A microelectromechanical (MEM) module comprising:
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a plurality of MEM device substrates, each of which includes at least one MEM device thereon;
a base substrate including a face; and
a mounting structure that is configured to mount the plurality of MEM device substrates on the face. - View Dependent Claims (2, 3, 4, 5)
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6. A microelectromechanical (MEM) mirror module comprising:
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a plurality of MEM mirror substrates, each of which includes a mirror comprising monocrystalline silicon, a frame comprising monocrystalline silicon that is spaced apart from and at least partially surrounds the mirror and at least two hinges between the mirror and the frame;
a base substrate including a face; and
a mounting structure that is configured to mount the frames of the plurality of MEM device substrates on the face. - View Dependent Claims (7, 8, 9, 10, 11, 13, 14, 15, 16, 18, 19, 20)
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12. A method of fabricating a microelectromechanical (MEM) mirror module comprising:
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providing a silicon-on-insulator substrate that includes a monocrystalline silicon layer on a bulk silicon substrate, with an insulator layer therebetween;
fabricating at least two spaced apart pads in the monocrystalline silicon layer that extend through the monocrystalline silicon layer to the insulator layer;
fabricating at least one hinge on each of the at least two spaced apart pads;
defining a mirror and a frame that at least partially surrounds the mirror, in the monocrystalline silicon layer, such that the hinges bridge the mirror and the frame; and
forming a metal layer on at least a portion of the mirror and at least a portion of the frame, opposite the insulator layer.
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17. A method of fabricating a movable microeoectromechanical (MEM) structure comprising:
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etching an array of features in a silicon substrate;
at least partially thermally oxidizing the array of features to form a pad comprising silicon dioxide in the silicon substrate;
forming a movable MEM structure on the pad; and
removing the pad to release the movable MEM structure.
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Specification