Substrate transport container

• US 20020129707A1
• Filed: 03/12/2002
• Published: 09/19/2002
• Est. Priority Date: 07/06/1999
• Status: Active Grant

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation
• Inventors: Tanaka, Akira, Okubo, Kazuo, Suzuki, Yoko
• Granted Patent: US 6,770,109 B2
• Time in Patent Office: Days
• US Class Current: 95/273
• CPC Class Codes: H01L 21/67393 characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover

Abstract

A substrate transport container having a carrier box including a container body and a door hermetically sealably covering an opening provided in the front of the container body. Partitions form a circulating flow path in the carrier box. The circulating flow path has a flow path in which air flows toward substrates and a flow path in which air flows toward a fan. A substrate carrying section is disposed in the flow path in which air flows toward the substrates to carry the substrates in such a way that the principal surfaces of the substrates are approximately parallel to the flow path in which air flows toward the substrates. A particle removing filter and a gaseous impurity trapping filter are placed on the upstream side of the substrate carrying section in the flow path in which air flows toward the substrates. A fan motor for driving the fan is incorporated in the carrier box to form an air current for circulating through the circulating flow path.

Claims

1. A system for transporting substrates comprising:

a substrate transport container having a container body with an opening and a wafer loading/unloading door sealably covering the opening;

a substrate carrying section disposed in the transport container;

a fan attached to the container and configured to form a circulating flow toward said substrates in the transport container;

a combination of a particle removing filter and a gaseous impurity trapping filter disposed upstream of said substrate carrying section in the circulating flow;

a first charging terminal disposed outside of the transport container;

a door opener to open and close the wafer loading/unloading door having a second charging terminal, and wherein the first and second charging terminals being connected when the substrate transport container is placed on the door opener.