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Method for making electronic devices including silicon and LTCC and devices produced thereby

  • US 20020130408A1
  • Filed: 03/08/2001
  • Published: 09/19/2002
  • Est. Priority Date: 12/19/2000
  • Status: Active Grant
First Claim
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1. A method for making an electronic device comprising:

  • positioning first and second members so that opposing surfaces thereof are in contact with one another, the first member comprising silicon and the second member comprising a low temperature co-fired ceramic (LTCC) material; and

    anodically bonding together the opposing surfaces of the first and second members to form a hermetic seal therebetween.

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