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Micro-electromechanically tunable vertical cavity photonic device and a method of fabrication thereof

  • US 20020131458A1
  • Filed: 03/15/2001
  • Published: 09/19/2002
  • Est. Priority Date: 03/15/2001
  • Status: Active Grant
First Claim
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1. A tunable Fabry-Perot vertical cavity device comprising top and bottom semiconductor distributed Bragg reflector (DBR) stacks separated by a tunable air-gap cavity and a supporting structure that carries the top DBR stack, wherein the air-gap cavity is located within a recess formed in a spacer completely covered by the supporting structure, the top DBR stack being centered around a vertical axis passing through the center of said recess and having a lateral dimension smaller than the lateral dimension of the recess, a region of the supporting structure outside the top DBR stack and above the recess presenting a membrane to be deflected by application of a tuning voltage to electrical contacts of the device

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