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Film forming apparatus and film forming method

  • US 20020132047A1
  • Filed: 03/08/2002
  • Published: 09/19/2002
  • Est. Priority Date: 03/12/2001
  • Status: Active Grant
First Claim
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1. A film forming apparatus comprising:

  • a container;

    a heater; and

    a substrate holder, wherein the heater comprises heating means for heating the container and moving means.

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