Method for making a micromechanical device by using a sacrificial substrate
First Claim
1. A method for forming a micromechanical device, comprising:
- fully or partially forming one or more micromechanical structures multiple times on a first substrate;
bonding a second substrate onto the first substrate so as to cover the multiple areas each having one or more micromechanical structures, so as to form a substrate assembly;
separating the substrate assembly into individual dies, each die having the one or more micromechanical structures held on a portion of the first substrate, with a portion of the second substrate bonded to the first substrate portion; and
removing the second substrate portion from each die to expose the one or more micromechanical structures on the first substrate portion.
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Accused Products
Abstract
A method is disclosed for forming a micromechanical device. The method includes fully or partially forming one or more micromechanical structures multiple times on a first substrate. A second substrate is bonded onto the first substrate so as to cover the multiple areas each having one or more micromechanical structures, so as to form a substrate assembly. The substrate assembly is then separated into individual dies, each die having the one or more micromechanical structures held on a portion of the first substrate, with a portion of the second substrate bonded to the first substrate portion. Finally, the second substrate portion is removed from each die to expose the one or more micromechanical structures on the first substrate portion. The invention is also directed to a method for forming a micromechanical device, including: forming one or more micromechanical structures in one or more areas on a first substrate; bonding caps onto the first substrate so as to cover the one or more areas each having one or more micromechanical structures, so as to form a substrate assembly; after a period of time, removing the caps to expose the one or more micromechanical structures. During the period of time between bonding the caps and later removing the caps, the substrate assembly can be singulated, inspected, irradiated, annealed, die attached, shipped and/or stored.
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Citations
129 Claims
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1. A method for forming a micromechanical device, comprising:
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fully or partially forming one or more micromechanical structures multiple times on a first substrate;
bonding a second substrate onto the first substrate so as to cover the multiple areas each having one or more micromechanical structures, so as to form a substrate assembly;
separating the substrate assembly into individual dies, each die having the one or more micromechanical structures held on a portion of the first substrate, with a portion of the second substrate bonded to the first substrate portion; and
removing the second substrate portion from each die to expose the one or more micromechanical structures on the first substrate portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90)
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91. A method for forming a plurality of micromirror arrays comprising micromirrors, the method comprising:
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forming micromirror arrays multiple times on a first substrate;
bonding a second substrate onto the first substrate so as to cover the multiple areas each having a micromirror array, so as to form a substrate assembly;
separating the substrate assembly into individual dies, each die having a micromirror array on a portion of the first substrate with a portion of the second substrate bonded to the first substrate portion; and
removing the second substrate portion from each die to expose the one or more micromechanical structures on the first substrate portion. - View Dependent Claims (92, 93, 94, 95, 96, 97, 98, 99)
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101. A method for forming a micromechanical device, comprising:
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forming one or more micromechanical structures in one or more areas on a first substrate;
bonding caps onto the first substrate so as to cover the one or more areas each having one or more micromechanical structures, so as to form a substrate assembly;
after a period of time, removing the caps to expose the one or more micromechanical structures. - View Dependent Claims (100, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118, 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129)
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Specification