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Method and apparatus for on-chip measurement of micro-gyro scale factors

  • US 20020134154A1
  • Filed: 03/23/2001
  • Published: 09/26/2002
  • Est. Priority Date: 03/23/2001
  • Status: Abandoned Application
First Claim
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1. A method for measuring the scale factor of a gyro having an inertial mass, comprising the steps of:

  • driving said inertial mass in a periodic drive motion;

    rotating said inertial mass about a rate axis perpendicular to the drive axis; and

    detecting a Coriolis force generated in response to said periodic drive motion and said rotational motion about said rate axis.

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