Counter plate electrode with self adjusting z-axis
First Claim
1. A device for accurately forming grooves of a precise pre-selected depth on a flat surface comprising an electrode for use in an ECM (electro chemical machining system), the electrode being designed for imparting a grooved pattern to a flat surface, the electrode comprising a surface carrying the pattern to be formed on the flat surface, and a central rod extending a short distance above the electrode surface, the central rod precisely setting the gap between the electrode and the flat surface.
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Abstract
The present invention relates to a method and apparatus for properly and consistently spacing an electrode from a workpiece while electrochemically etching (ECM) grooves to a precise depth in a surface of the workpiece to form a fluid dynamic bearing. The electrode is especially designed for imparting a grooved pattern to a flat surface, the electrode comprising a surface carrying the pattern to be formed on the flat surface, and a central rod extending a short distance above the electrode surface. The central rod precisely sets the gap between the electrode and the flat surface. The electrode is adapted to be electrically connected to a power supply so that the electrode serves as the cathode, and the flat work piece serves as the anode in an ECM system.
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Citations
20 Claims
- 1. A device for accurately forming grooves of a precise pre-selected depth on a flat surface comprising an electrode for use in an ECM (electro chemical machining system), the electrode being designed for imparting a grooved pattern to a flat surface, the electrode comprising a surface carrying the pattern to be formed on the flat surface, and a central rod extending a short distance above the electrode surface, the central rod precisely setting the gap between the electrode and the flat surface.
- 11. A system for defining a groove pattern of a precise depth on a flat surface of a workpiece utilitizing electrochemical machining (ECM) comprising a first device for supporting the flat surface of the workpiece facing an electrode, and an electrode designed for imparting a grooved pattern to a flat surface, the electrode comprising an outer section ending in a surface carrying the pattern to be formed on the flat surface, and a central rod extending a short distance above the annular electrode surface, the central electrically inert center rod precisely setting the gap between the electrode and the flat surface.
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19. A system for defining a groove pattern of a precise depth on a flat surface of a workpiece utilizing electrochemical machining (ECM) comprising a first device for supporting the flat surface of the workpiece facing an electrode, and electrode means facing the flat surface for imparting a grooved pattern to a flat surface.
Specification