Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof

• US 20020135387A1
• Filed: 04/10/2002
• Published: 09/26/2002
• Est. Priority Date: 04/03/1998
• Status: Active Grant

• Current Assignee: Renesas Electronics Corporation
• Original Assignee: Akio Hasebe, Susumu Kasukabe
• Inventors: Hasebe, Akio, Kasukabe, Susumu
• Granted Patent: US 6,900,646 B2
• Time in Patent Office: Days
• US Class Current: 324/754
• CPC Class Codes: G01R 1/06738 related to tip portion
• CPC Class Codes: G01R 1/0735 arranged on a flexible frame or film
• CPC Class Codes: G01R 3/00 Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments , e.g. of probe tips
• CPC Class Codes: H05K 3/4007 Surface contacts, e.g. bumps H05K3/4092 takes precedence; deposition of finish layers on pads H05K3/24; forming solder bumps H05K3/3457

Abstract

A probing device for electrically contacting with a plurality of electrodes 3, 6 aligned on an object 1 to be tested so as to transfer electrical signal therewith, comprising: a wiring sheet being formed by aligning a plurality of contact electrodes 21, 110b, corresponding to each of said electrodes, each being planted with projecting probes 20, 110a covered with hard metal films on basis of a conductor thin film 41 formed on one surface of an insulator sheet 22 of a polyimide film by etching thereof, while extension wiring 23, 110c for electrically connecting to said each of said contact electrodes being formed on basis of a conductor thin film formed on either said one surface or the other surface opposing thereto of said insulator sheet of the polyimide film; and means for giving contacting pressure for obtaining electrical conduction between said extension wiring and said object to be tested by contacting tips of said projecting contact probe formed onto said each contact electrode through giving pressuring force between said wiring sheet and said object to be tested.

Claims

1. A probing device for electrically contacting with a plurality of electrodes aligned on an object to be tested so as to transfer electrical signal therewith, comprising:

a wiring sheet being formed by aligning a plurality of contact electrodes corresponding to each of said electrodes, each being formed with one or more projecting probes on one surface of an insulator sheet, while extension wiring for electrically connecting to said each of said contact electrodes being formed either on said one surface or the other surface opposing thereto of said insulator sheet; and

means for giving contacting pressure for obtaining electrical conduction between said extension wiring and said object to be tested by contacting tips of said one or more of the projecting contact probes formed onto said each contact electrode through giving pressuring force between said wiring sheet and said object to be tested.

7. A probing device as defined in the claim 1, 2 or 3, wherein an element or parts for adjusting impedance on a way of said extension wiring in said wiring sheet.

11. A probing device as defined in the claim 1, 2 or 3, wherein the projecting probe has a flat portion at tip thereof in said wiring sheet.

12. A probing device as defined in the claim 1, 2 or 3, wherein the extension wiring formed on the opposite surface of the contact electrodes and the contact electrodes are connected through a via hole formed on the insulator sheet in said wiring sheet.

16. A testing apparatus as defined in the claim 13, 14 or 15, further comprising a support member for supporting said wiring sheet, wherein said support member has a compliance mechanism.

18. A testing apparatus as defined in the claim 17, wherein said separated probe system is mounted on a mother board and is connected to the tester through said mother board.

21. A manufacturing method of a probing device as defined in the claim 19 or 20, wherein the etching in said third manufacturing step is shower etching.

2. A probing device for electrically contacting with a plurality of electrodes aligned on an object to be tested so as to transfer electrical signal therewith, comprising:

a wiring sheet being formed by aligning a plurality of contact electrodes, corresponding to each of said electrodes, each being formed with projecting probe on basis of a conductor thin film formed on one surface of an insulator sheet thereof, while extension wiring for electrically connecting to said each of said contact electrodes being formed on basis of a conductor thin film formed on either said one surface or the other surface opposing thereto of said insulator sheet; and

means for giving contacting pressure for obtaining electrical conduction between said extension wiring and said object to be tested by contacting tips of said projecting contact probe formed onto said each contact electrode through giving pressuring force between said wiring sheet and said object to be tested.

4. A probing device as defined in the claim 2 or 3, wherein a plurality of projecting probes are formed for each of said contact electrodes in said wiring sheet.

5. A probing device as defined in the claim 2, 3 or 4, wherein the conductor thin film is a copper thin film in said wiring sheet.

8. A probing device as defined in the claim 2 or 3, wherein the projecting probe is formed on each of the contact electrodes with shower etching in said wiring sheet.

3. A probing device for electrically contacting with a plurality of electrodes aligned on an object to be tested so as to transfer electrical signal therewith, comprising:

a wiring sheet being formed by aligning a plurality of contact electrodes, corresponding to each of said electrodes, each being formed with projecting probe on basis of a conductor thin film and a conductor plating film thereon formed on one surface of an insulator sheet thereof, while extension wiring for electrically connecting to said each of said contact electrodes being formed on basis of a conductor thin film formed on either said one surface or the other surface opposing thereto of said insulator sheet; and

means for giving contacting pressure for obtaining electrical conduction between said extension wiring and said object to be tested by contacting tips of said projecting contact probe formed onto said each contact electrode through giving pressuring force between said wiring sheet and said object to be tested.

6. A probing device as defined in the claim 3, wherein the conductor plating film is a nickel plating film in said wiring sheet.

9. A probing device as defined in the claim 3, wherein the projecting probe is formed on each of the contact electrodes on basis of the conductor plating film with shower etching in said wiring sheet.

10. A probing device as defined in the claim 3, wherein the projecting probe is formed on each of the contact electrodes on basis of the conductor plating film with a local plating in said wiring sheet.

13. A testing apparatus for conducting test on an object to be tested by transferring and electric signal, comprising:

a wiring sheet being formed by aligning a plurality of contact electrodes corresponding to each of said electrodes formed on the object to be tested, each being formed with one or more projecting probes on one surface of an insulator sheet thereof, while extension wiring being electrically connected to said each of said contact electrodes and being covered with a protection film is formed either on said one surface or the other surface opposing thereto of said insulator sheet;

positioning means for positioning said object to be tested at least flatly with respect to said wiring sheet;

means for giving contacting pressure for obtaining electrical conduction between said extension wiring positioned by said positioning means and said object to be tested by contacting tips of said one or more of the projecting contact probes formed onto said each contact electrode through giving pressuring force between said wiring sheet and said object to be tested; and

a tester being electrically connected with the extension wiring extended in periphery portion of said wiring sheet, whereby the electrical signal is transferred from said tester to said object to be tested so as to conduct the test.

14. A testing apparatus for conducting test on an object to be tested by transferring and electric signal, comprising:

a wiring sheet being formed by aligning a plurality of contact electrodes, corresponding to each of said electrodes aligned on the object to be tested, each being formed with projecting probe on basis of a conductor thin film formed on one surface of an insulator sheet thereof, while extension wiring for electrically connecting to said each of said contact electrodes being formed on basis of a conductor thin film formed on either said one surface or the other surface opposing thereto of said insulator sheet;

positioning means for positioning said object to be tested at least flatly with respect to said wiring sheet;

means for giving contacting pressure for obtaining electrical conduction between said extension wiring positioned by said positioning means and said object to be tested by contacting tips of said projecting contact probes formed onto said each contact electrode through giving pressuring force between said wiring sheet and said object to be tested; and

a tester being electrically connected with the extension wiring extended in periphery portion of said wiring sheet, whereby the electrical signal is transferred from said tester to said object to be tested so as to conduct the test.

15. A testing apparatus for conducting test on an object to be tested by transferring and electric signal, comprising:

a wiring sheet being formed by aligning a plurality of contact electrodes, corresponding to each of said electrodes aligned on the object to be tested, each being formed with projecting probe on basis of a conductor thin film and a conductor plating film thereon formed on one surface of an insulator sheet thereof, while extension wiring for electrically connecting to said each of said contact electrodes being formed on basis of a conductor thin film formed on either said one surface or the other surface opposing thereto of said insulator sheet;

positioning means for positioning said object to be tested at least flatly with respect to said wiring sheet; and

a tester being electrically connected with the extension wiring extended in periphery portion of said wiring sheet, whereby the electrical signal is transferred from said tester to said object to be tested so as to conduct the test.

17. A testing apparatus comprising:

a sample support portion for supporting an object to be tested;

at least one of a separated probe system, comprising;

a wiring sheet being formed by aligning a plurality of contact electrodes, corresponding to each of said electrodes aligned on the object to be tested, each being formed with projecting probe on basis of a conductor thin film formed on one surface of an insulator sheet thereof, while extension wiring for electrically connecting to said each of said contact electrodes being formed on basis of a conductor thin film formed on either said one surface or the other surface opposing thereto of said insulator sheet; and

means for giving contacting pressure for obtaining electrical conduction between said extension wiring positioned by said positioning means and said object to be tested by contacting tips of said projecting contact probes formed onto said each contact electrode through giving pressuring force between said wiring sheet and said object to be tested; and

a tester connected to said separated probe system for conducting the test.

19. A manufacturing method of a probing device being constructed with a wiring sheet for electrically contacting with a plurality of electrodes aligned on an object to be tested so as to transfer electrical signal therewith, comprising:

a first manufacturing step for preparing a sheet of insulator being formed with a conductor film on a surface thereof;

a second manufacturing step for forming an extension wiring from the conductor film of the sheet prepared in said first manufacturing step by patterning thereof; and

a third manufacturing step for forming contact electrode by connecting a portion corresponding to said electrode in the conductor film of the sheet prepared in said first manufacturing step with the extension wiring formed with said second manufacturing step, by forming one or more of projecting contact probes with etching a surface layer at positions corresponding to said electrodes in said conductor film, and by patterning the portion on which said one or more of projecting probes are formed.

20. A manufacturing method of a probing device being constructed with a wiring sheet for electrically contacting with a plurality of electrodes aligned on an object to be tested so as to transfer electrical signal therewith, comprising:

a first manufacturing step for preparing a sheet of insulator being formed with a conductor film on a surface thereof;

a second manufacturing step for forming an extension wiring from the conductor film of the sheet prepared in said first manufacturing step by patterning thereof; and

a third manufacturing step for forming the contact electrode by forming a plating film on the conductor film of the sheet prepared in said first manufacturing step, by connecting a portion corresponding to said electrode in the conductor film of the sheet prepared in said first manufacturing step with the extension wiring formed with said second manufacturing step, by forming one or more of projecting contact probes with etching a surface layer at positions corresponding to said electrodes in said plating film, and by patterning the portion on which said one or more of projecting probes are formed.

22. A manufacturing method of a probing device being constructed with a wiring sheet for electrically contacting with a plurality of electrodes aligned on an object to be tested so as to transfer electrical signal therewith, comprising:

a first manufacturing step for preparing a sheet of insulator being formed with a conductor film on a surface thereof;

a second manufacturing step for forming one or more projecting probes by etching a surface layer at positions corresponding to said electrodes in the conductor layer of the sheet prepared in said first manufacturing step; and

a third manufacturing step for connecting the conductor film of the sheet prepared in said first manufacturing step with said extension wiring, and by patterning the contact electrodes on which the one or more of the projecting probes are formed in said second manufacturing step.

23. A manufacturing method of a probing device as defined in the claim 22, wherein the etching in said third manufacturing step is shower etching.

24. A manufacturing method of a probing device being constructed with a wiring sheet for electrically contacting with a plurality of electrodes aligned on an object to be tested so as to transfer electrical signal therewith, comprising:

a first manufacturing step for preparing a sheet of insulator being formed with a conductor film on a surface thereof;

a second manufacturing step for forming extension wiring on the conductor film of the sheet prepared in said first manufacturing process by patterning thereof; and

a third manufacturing step for forming contact electrodes by connecting a portion corresponding to said electrodes in the conductor film of the sheet prepared in said first manufacturing step with the extension wiring formed with said second manufacturing step, by patterning the portion corresponding to position corresponding to said electrodes in said conductor film, and by forming one or more projecting probes with local planting on each portion of the conductor films which are patterned.

25. A method for manufacturing semiconductor element with testing thereof by transferring electrical signals with respect to said semiconductor elements, wherein said semiconductor element is tested with use of a testing apparatus, comprising:

a wiring sheet being formed by aligning a plurality of contact electrodes corresponding to each of electrodes aligned on said semiconductor element, each being formed with one or more projecting probes on one surface of an insulator sheet thereof, while extension wiring being electrically connecting to said each of said contact electrodes and covered with a protection film is formed either on said one surface or the other surface opposing thereto of said insulator sheet;

positioning means for positioning said semiconductor element at least flatly with respect to said wiring sheet;

means for giving contacting pressure for obtaining electrical conduction between said extension wiring and said semiconductor element by contacting tips of said one or more of the projecting contact probes formed on said each contact electrode through giving pressuring force between said wiring sheet positioned by said positioning means and said semiconductor element; and

a tester being electrically connected with the extension wiring extended in periphery portion of said wiring sheet.