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Apparatus and method for carrying out analysis of samples using radiation detector split beam radiation inspection

  • US 20020135754A1
  • Filed: 11/16/2001
  • Published: 09/26/2002
  • Est. Priority Date: 09/21/1994
  • Status: Active Grant
First Claim
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1. A method of conducting an optical inspection of a biological, chemical, or biochemical sample, the method comprising the steps of;

  • supporting the sample on a substrate;

    directing a beam of electromagnetic radiation from a radiation source onto the substrate;

    scanning the beam over the substrate by rotating the substrate about an axis substantially perpendicular to the substrate and by moving the radiation source in a direction having a component radial to said axis; and

    detecting radiation reflected from and/or transmitted through the substrate and sample and providing an output signal corresponding to the detected radiation.

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