Substrate transport container

• US 20020135966A1
• Filed: 05/16/2002
• Published: 09/26/2002
• Est. Priority Date: 05/17/2001
• Status: Active Grant

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation
• Inventors: Tanaka, Akira, Kishi, Takashi, Suzuki, Yoko
• Granted Patent: US 6,875,282 B2
• Time in Patent Office: Days
• US Class Current: 361/212
• CPC Class Codes: G03F 1/66 Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
• CPC Class Codes: H01L 21/67379 characterised by coupling elements, kinematic members, handles or elements to be externally gripped
• CPC Class Codes: H01L 21/67393 characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
• CPC Class Codes: Y10S 414/135 Associated with semiconductor wafer handling
• CPC Class Codes: Y10S 414/14 Wafer cassette transporting

Abstract

This invention provides a substrate transport container for use, for example, in the process of manufacturing integrated circuits of less than 0.13 μm line width, to enable to hold the level of contaminants in the interior of the container for at least particles, acidic gases, basic gases, organic substances and humidity at controlled low levels, and having the size and structure to be compatible with automated semiconductor manufacturing plants. The container is provided with a door for loading and unloading substrates on a surface of a container main body and is constructed so as to hold the substrates inside the container main body at a given distance of separation, wherein air conditioning apparatuses for reducing the levels of particulate and gaseous contaminants, are disposed roughly symmetrically on the container main body.

Claims

1. A substrate transport container having a door for loading and unloading substrates on a surface of a container main body and constructed so as to hold the substrates inside the container main body at a given distance of separation, wherein air conditioning apparatuses are disposed substantially symmetrically on a lateral surface of the container main body for reducing concentrations of particles and gaseous contaminants in interior of the container.

2. A substrate transport container according to claim 1, wherein a device is further provided for reducing and/or adjusting humidity in interior of the container.

3. A substrate transport container according to claim 1, wherein the container main body and a holding member for holding substrates are formed integrally as a unit body.

4. A substrate transport container according to claim 3, wherein the container main body and the holding member for holding substrates are comprised by static-charge conductive material or static-charge dispersing material.

5. A substrate transport container according to claim 1, wherein the container main body and a holding member for holding substrates are made as separate members.

6. A substrate transport container according to claim 1, wherein the container main body is made of a material having a water absorption factor of less than 0.1%.

7. A substrate transport container according to claim 2, wherein the device for adjusting humidity utilizes a solid polymer electrolytic film.

8. A substrate transport container according to claim 1, wherein the air conditioning apparatus is comprised by an air circulation device, a particle removal filter and a gaseous contaminants removal filter.

9. A substrate transport container according to claim 1, wherein the container main body is provided with a door in a front surface, a power source unit in a rear surface, and air conditioning apparatuses on both lateral surfaces.

10. A substrate transport container according to claim 1, wherein the container main body is provided with a cover for isolating an interior environment of the container main body from an external environment on both lateral surfaces of the container main body, and openings are provided on said lateral surfaces of the main body inside said cover to communicate with an interior space of the container main body so as to circulate air that has been adjusted in the air conditioning apparatus disposed inside the cover through the interior space of the container main body.

11. A substrate transport container according to claim 10, wherein an opening is disposed on a front surface side and another opening is disposed on a rear surface side of the container main body.

12. A substrate transport container according to claim 9, wherein air is circulated by directing from an opening provided in a rear surface side through interior of container main body to an opening provided in a front surface side.

13. A substrate transport container according to claim 1, wherein the container main body is provided with a gas inlet port and a gas outlet port having a check valve in each port.