Silicon microlancet device and method of construction
First Claim
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1. A microlancet device formed of silicon and having a sharp point for piercing the skin of a subject.
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Abstract
A minimally intrusive, self-use microlancet device is provided. The microlancet device is capable of piercing a patient'"'"'s skin reliably and virtually painlessly for obtaining a blood sample. The microlancet device comprises a silicon wafer formed into a sharp probe for piercing the patient'"'"'s skin. Also provided is a fabrication method for the microlancet device.
147 Citations
23 Claims
- 1. A microlancet device formed of silicon and having a sharp point for piercing the skin of a subject.
- 5. The microlancet device of claim 5 wherein the nitride film has a thickness of approximately 2000 Angstroms.
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8. The microlancet device of claim 8 wherein the portion of the nitride film is removed by potassium hydroxide.
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9. The microlancet device of claim 9 and further comprising a photoresist coating applied to the silicon wafer.
- 11. The microlancet device of claim 11 and further comprising removing the photoresist coating.
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12. A method-of constructing a microlancet device formed of silicon and having a sharp point for piercing the skin of a subject, the method comprising:
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providing a silicon substrate; and
plasma etching the silicon substrate into a sharp probe for piercing the patient'"'"'s skin.
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- 22. The method of claim 22 and further comprising patterning the silicon wafer with a plasma etching process.
Specification