Plasma processing method and apparatus with control of plasma excitation power
First Claim
1. A method of processing a workpiece in a vacuum plasma processor chamber wherein a gas species is converted into an AC plasma, the vacuum chamber being subject to operating at different pressures while the workpiece is being processed, the gas species being subject to flowing into the chamber at different flow rates while the workpiece is being processed, comprising, gradually changing on a pre-programmed basis, the amount of AC power supplied to the plasma during processing of the workpiece.
1 Assignment
0 Petitions
Accused Products
Abstract
The amount of RF power supplied to a plasma in a vacuum plasma processing chamber is gradually changed on a preprogrammed basis in response to signals stored in a computer memory. The computer memory stores signals so that other processing chamber parameters (pressure, gas species and gas flow rates) remain constant while the gradual change occurs. The stored signals enable rounded corners, instead of sharp edges, to be etched, e.g., at an intersection of a trench wall and base.
-
Citations
22 Claims
- 1. A method of processing a workpiece in a vacuum plasma processor chamber wherein a gas species is converted into an AC plasma, the vacuum chamber being subject to operating at different pressures while the workpiece is being processed, the gas species being subject to flowing into the chamber at different flow rates while the workpiece is being processed, comprising, gradually changing on a pre-programmed basis, the amount of AC power supplied to the plasma during processing of the workpiece.
-
14. A vacuum plasma processor for processing a workpiece in a vacuum plasma processor chamber wherein a gas species is converted into an AC plasma comprising a reactive element for supplying an electric field to plasma in the chamber, and an electric source for supplying gradually changing amounts of power on a preprogrammed basis to the reactive element.
-
17. A computer program for controlling a computer for controlling processing of a workpiece in a vacuum plasma processor chamber wherein a gas species is converted into an AC plasma, the computer program storing signals causing (a) the vacuum chamber to operate at different pressures while the workpiece is being processed, (b) control of the gas species type and the flow rates thereof into the chamber while the workpiece is being processed, (c) the amount of AC power applied to the plasma while the workpiece is being processed;
- the stored signal for the amount of applied AC power causing gradual preprogrammed changes in the amount of AC power supplied to the plasma during processing of the workpiece.
Specification