Thin-film deposition of low conductivity targets using cathodic ARC plasma process

• US 20020139662A1
• Filed: 02/21/2001
• Published: 10/03/2002
• Est. Priority Date: 02/21/2001
• Status: Abandoned Application

• Current Assignee: Brent W. Lee
• Original Assignee: Brent W. Lee
• Inventors: Lee, Brent W.
• Application Number:
  US09/791,438
• Publication Number:
  US 20020139662A1
• Time in Patent Office: Days
• US Class Current: 204/192.38
• CPC Class Codes: C23C 14/325 Electric arc evaporation
• CPC Class Codes: H01J 37/32055 Arc discharge
• CPC Class Codes: H01J 37/3266 Magnetic control means

Abstract

This invention discloses a cathodic arc deposition apparatus for depositing a layer of low-conductivity material on a surface of a substrate. The cathodic arc deposition apparatus includes a source contained in a vacuum chamber. The source further includes a target mount for mounting a target thereon wherein the target comprising fused mixture of powders of the low-conductivity material hot-pressed with powders of a high conductivity material functioning as conductivity-enhancement matrix. The cathodic arc deposition apparatus further includes an electric arc for striking the target to evaporate a plurality of ions of the low conductivity material and the high conductivity material. The cathodic arc deposition apparatus further includes an ion trajectory guiding means for guiding the ions for projecting to the substrate contained in the vacuum chamber. The cathodic arc deposition apparatus further includes an ion shielding means for selective shielding ions of the conductive material for depositing only the ions of the low-conductivity material on the substrate.

Claims

1. A cathodic arc deposition apparatus for depositing a layer of low-conductivity or non-conductive material on a surface of a substrate comprising:

a source contained in a vacuum chamber;

said source further includes a target mount for mounting a target thereon wherein said target comprising fused mixture of powders of said low-conductivity or non-conductive material hot-pressed with powders of a high conductivity material functioning as conductivity-enhancement matrix.

2. The cathodic arc deposition apparatus of claim 1 further comprising:

an electric arc striker for striking said target to evaporate a plurality of ions of said low conductivity material and said high conductivity material.

3. The cathodic arc deposition apparatus of claim 2 further comprising:

an ion trajectory guiding means for guiding said ions for projecting to said substrate contained in said vacuum chamber.

4. The cathodic arc deposition apparatus of claim 2 further comprising:

an ion shielding means for selective shielding ions of said conductive material for depositing only said ions of said low-conductivity material on said substrate.

5. The cathodic arc deposition apparatus of claim 3 wherein:

said ion trajectory guiding means further comprising a magnetic guiding means for magnetically guiding and projecting said ions onto said substrate.

6. The cathodic arc deposition apparatus of claim 1 further comprising:

a reactive gas means for introducing a reactive gas into said vacuum chamber for reacting with said ions of said low-conductivity material.

7. The cathodic arc deposition apparatus of claim 1 wherein:

said source further includes a target mount for mounting said target wherein said target mount further includes coolant channels for conducting coolant therein for cooling said target and said target mount.

8. The cathodic arc deposition apparatus of claim 1 wherein:

said target further comprising fused powder of LiPO4 as said low conductivity or non-conductive material.

9. The cathodic arc deposition apparatus of claim 1 wherein:

said target further comprising fused powder of silicon as said low conductivity or non-conductive material.

10. The cathodic arc deposition apparatus of claim 1 further comprising:

a controller for controlling said cathodic arc deposition apparatus.

11. A conductivity-enhanced target for implementing as source of thin film deposition comprising:

a fused mixture of powders of a low-conductivity target material mixed and hot-pressed with powders of a high-conductivity material functioning as a conductivity-enhancement matrix.

12. The conductivity-enhanced target of claim 11 wherein:

said low conductivity target further comprising fused powder of LiPO4.

13. The conductivity-enhanced target of claim 11 wherein:

said low conductivity target further comprising fused powder of silicon.

14. The conductivity-enhanced target of claim 11 wherein:

said high conductivity material further comprising aluminum.

15. The conductivity-enhanced target of claim 11 wherein:

said low conductivity target further comprising fused powder of LiPO4 with a weight percentage of approximately 90%, and said high conductivity material further comprising aluminum with a weight percentage of approximately 10%.

17. The method of claim 16 wherein:

said step of fusing a mixture of powders of said low conductivity target further comprising a step of fusing a mixture of powders of LiPO4.

18. The method of claim 16 wherein:

said step of fusing a mixture of powders of said low conductivity target further comprising a step of fusing a mixture of powders of silicon.

19. The method of claim 16 wherein:

said step of fusing a mixture of powders of said high conductivity material further comprising a step of fusing a mixture of powders of aluminum.

20. The method of claim 16 wherein:

said step of fusing a mixture of powders of said low conductivity target further comprising a step of fusing a mixture of powders of LiPO4 with a weight percentage of approximately 90%, and said step of fusing a mixture of powders of said high conductivity material further comprising a step of fusing a mixture of powders of aluminum with a weight percentage of approximately 10%.

16. A method for depositing a low conductivity material on a surface of substrate comprising

forming a conductivity-enhanced target by fusing a mixture powders of said low-conductivity target with powders of a high conductivity material functioning as a conductivity-enhancement matrix.