ANTI-REFLECTION HIGH CONDUCTIVITY MULTI-LAYER COATING FOR FLAT CRT PRODUCTS

• US 20020141064A1
• Filed: 01/10/2001
• Published: 10/03/2002
• Est. Priority Date: 01/10/2001
• Status: Active Grant

• Current Assignee: Chao-Sung Li, Cheng Chen Shih, Jau-Jier Chu, Shao Chi Chang
• Original Assignee: Applied Vacuum Coating Technologies Co., Ltd.
• Inventors: Chu, Jau-Jier, Li, Chao-Sung, Chang, Shao Chi, Shih, Cheng Chen
• Granted Patent: US 6,441,964 B1
• Time in Patent Office: Days
• US Class Current: 359/586
• CPC Class Codes: C03C 17/36 at least one coating being a metal
• CPC Class Codes: C03C 17/3618 Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
• CPC Class Codes: C03C 17/3657 the multilayer coating having optical properties
• CPC Class Codes: C03C 2217/734 comprising an alternation of high and low refractive indexes
• CPC Class Codes: C03C 2217/94 Transparent conductive oxide layers [TCO] being part of a multilayer coating
• CPC Class Codes: C03C 2217/948 Layers comprising indium tin oxide [ITO]
• CPC Class Codes: G02B 1/116 including electrically conducting layers
• CPC Class Codes: H01J 2229/8913 Anti-reflection, anti-glare, viewing angle and contrast improving treatments or devices
• CPC Class Codes: H01J 29/896 Anti-reflection means, e.g. eliminating glare due to ambient light
• CPC Class Codes: Y10T 428/24975 No layer or component greater than 5 mils thick

Abstract

An anti-reflection with high conductivity and transmission controlled multi-layer coating for Flat CRT products is provided which includes five layers coating by vacuum sputtering and one layer coating by conventional wet process. The first layer is formed by an oxide material. The second layer is arranged on an underlying first layer and is formed by a metal. The third layer is arranged on an underlying second layer and is coated by vacuum sputtering. The third layer provides high conductivity thin film with resistance as low as 10² Ω/square. The fourth layer is arranged on an underlying third layer and is formed by an oxide material. The fifth layer is formed by an oxide material. The fourth layer and fifth layer are coated by vacuum sputtering. The sixth layer is deposited on the top surface and is formed by a wet silica coating process.

Claims

1. An anti-reflection high conductivity multi-layer coating for Flat CRT products comprising six layers designated as a first, a second, a third, a fourth, a fifth, and a sixth layer in a consecutive numerical order beginning with a layer nearest from a substrate;

said first layer being arranged under the second layer and comprising a good adhesion with glass substrate oxide material having a refractive index within 1.45 to 1.55 at a wavelength of 520 nm, the layer having a physical thickness of 10-30 mn, and the layer being produced by vacuum sputtering process,

said second layer being arranged on the first layer and comprising a metal having a refractive index within the approximating range of 1.5 to 4.0 at a wavelength of 520 nm, the layer having a physical thickness of 1-5 nm, and the layer being produced by vacuum sputtering process;

said third layer being arranged on the second layer and comprising an conductive oxide material having a refractive index between 1.85 to 2.1 at a wavelength of 520 nm, the layer having a physical thickness of 20-60 nm, and the layer being produced by vacuum sputtering process;

said fourth layer being arranged on the third layer and comprising a high chemical resistance oxide material having a refractive index within 2.0 to 2.5 at a wavelength of 520 nm, the layer having a physical thickness of 10-40 nm, and the layer being produced by vacuum sputtering process,

said fifth layer being arranged on the fourth layer and comprising a good adhesion and high chemical resistance oxide material having a refractive index within 1.45 to 1.55 at a wavelength of 520 nm, the layer having a physical thickness of 10-30 nm, and the layer is produced by vacuum sputtering process, and

said the sixth layer being arranged on the fifth layer and comprising an oxide material having a refractive index within 1.45 to 1.55 at a wavelength of 520 nm, the layer having a physical thickness of 60-120 nm, and the layer is produced by wet process.

2. The anti-reflection high conductivity multi-layer coating of claim 1, wherein said substrate is CRT.

3. The anti-reflection high conductivity multi-layer coating of claim 1, wherein said substrate is glass.

4. The anti-reflection high conductivity multi-layer coating of claim 1, wherein the first layer is SiO₂, said second layer is Cr, said third layer is ITO, said fourth layer is CrOx, said fifth layer is SiO₂, and sixth layer is silica.

5. The anti-reflection high conductivity multi-layer coating of claim 1, wherein the first layer comprises oxides selected from the group consisting of SiO₂ and SiAl-Oxide.

6. The anti-reflection high conductivity multi-layer coating of claim 1, wherein the second layer comprises metal selected from the group consisting of Cr, Ni, V, Ti, Co, Ta, and mixtures of thes metals.

7. The anti-reflection high conductivity multi-layer coating of claim 1, wherein the third layer comprises conductive oxides selected from the group consisting of ITO, IZO and ATO.

8. The anti-reflection high conductivity multi-layer coating of claim 1, wherein the fourth layer comprises oxides selected from the group consisting of CrOx, CuOx , TiN, TaN, ZrN, and NbN.

9. The anti-reflection high conductivity multi-layer coating of claim 1, wherein the fifth layer comprises oxides selected from the group consisting of SiO₂ and SiAl-Oxide.

10. The anti-reflection high conductivity multi-layer coating of claim 1, wherein the sixth layer comprises oxides selected from the group consisting of SiO₂, SiAl-Oxide and SiO compound.

11. The anti-reflection high conductivity multi-layer coating of claim 1, wherein the layers are applied by a combination process selected from the two groups consisting of a vacuum coating and wet process coating, the vacuum coating consisting of an evaporation or sputtering manufacturing process in either a batch or an in-line system;

the wet process coating consisting of a spin coating or spray coating or sol-gel or slurry in either a batch or an in-line system.