Manufacturing apparatus, control method of manufacturing apparatus, control system of manufacturing apparatus, computer readable recording medium with control program of manufacturing apparatus recorded therein and control program of manufacturing apparatus

• US 20020143422A1
• Filed: 05/28/2002
• Published: 10/03/2002
• Est. Priority Date: 09/28/2000
• Status: Abandoned Application

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Seta, Shoji
• Application Number:
  US10/154,977
• Publication Number:
  US 20020143422A1
• Time in Patent Office: Days
• US Class Current: 700/104
• CPC Class Codes: G05B 19/41865 characterised by job scheduling, process planning, material flow
• CPC Class Codes: G05B 2219/31457 Factory remote control, monitoring through internet
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

There is disclosed a control system of a manufacturing apparatus, which controls a semiconductor manufacturing apparatus, comprising an interface which is connected to an exclusive-use circuit and which to transmits and receives information to and from the exclusive-use circuit, a processor which transmits at least one of recipe information and software for controlling the manufacturing apparatus to the manufacturing apparatus having an interface from the interface via the exclusive-use circuit, and a database which is connected to the processor and which stores at least one of the recipe information and software.

Claims

1. A control system of a manufacturing apparatus which controls the manufacturing apparatus via a communication network, said control system comprising:

an interface which is connected to the communication network and which transmits and receives information to and from the communication network;

a processor which is connected to said interface and which transmits at least one of recipe information and software to control the manufacturing apparatus to the manufacturing apparatus from the interface via the communication network; and

storage means which is connected to said processor and which stores at least one of said recipe information and software.

2. The control system of the manufacturing apparatus according to claim 1, wherein said processor includes apparatus control means for controlling said manufacturing apparatus via said communication network.

3. The control system of the manufacturing apparatus according to claim 1, wherein said processor includes judgment means for judging a cause of the trouble based on trouble information received from said manufacturing apparatus via said interface.

4. The control system of the manufacturing apparatus according to claim 1, wherein the control system of said manufacturing apparatus is connected to a plurality of said manufacturing apparatuses via said communication network.

5. A manufacturing apparatus comprising:

a manufacturing unit;

an interface which is connected to a communication network and which transmits and receives information to and from the communication network;

a processor which is connected to said interface and which obtains at least one of software and recipe information to control said manufacturing unit from the interface via the communication network; and

storage means, connected to said processor, for storing at least one of said recipe information and software.

6. The manufacturing apparatus according to claim 5, wherein said processor includes apparatus control means for setting said manufacturing unit to be controllable based on a signal from said communication network.

7. The manufacturing apparatus according to claim 5, wherein said processor includes judgment means for judging a cause of a trouble of said manufacturing apparatus based on an operation content of said manufacturing unit obtained by controlling said manufacturing unit.

8. A control method of a manufacturing apparatus comprising:

making a connection request to the manufacturing apparatus via a communication network;

transmitting identification information in response to a request for the identification information from said manufacturing apparatus; and

transmitting at least one of recipe information and software to control said manufacturing apparatus.

9. The control method of the manufacturing apparatus according to claim 8, further comprising:

transmitting a control signal via the communication network to said manufacturing apparatus to control said manufacturing apparatus after transmitting at least one of said recipe information and the software.

10. The control method of the manufacturing apparatus according to claim 8, further comprising:

generating a trouble judgment result to specify a cause of the trouble based on information which specifies a content of the trouble generated in said manufacturing apparatus, and transmitting the trouble judgment result to said manufacturing apparatus.

11. The control method of the manufacturing apparatus according to claim 8, further comprising:

transmitting a control signal to said manufacturing apparatus to control said manufacturing apparatus via the communication network based on information which specifies the content of the trouble generated in said manufacturing apparatus.

12. The control method of the manufacturing apparatus according to claim 8, further comprising:

transmitting at least one of the recipe information and the software for solving the trouble based on information which specifies a content of a trouble generated in said manufacturing apparatus.

13. The control method of the manufacturing apparatus according to claim 8, further comprising:

transmitting at least one of the recipe information and the software for solving the trouble based on information which specifies a content of a trouble generated in said manufacturing apparatus,

wherein at least one of the recipe information and the software for solving said trouble to said manufacturing apparatus is transmitted when expense information for solving the trouble is presented to said manufacturing apparatus, and information indicating determination of payment of an expense for solving said trouble is received from said manufacturing apparatus.

14. The control method of the manufacturing apparatus according to claim 8, wherein a plurality of said manufacturing apparatuses are disposed, and

transmission of said connection request, and said identification information and transmission of at least one of said recipe information and the software are performed with respect to said plurality of manufacturing apparatuses.

16. The control method of the manufacturing apparatus according to claim 15, further comprising:

controlling said manufacturing unit based on a control signal obtained from said communication network via said interface.

17. The control method of the manufacturing apparatus according to claim 15, wherein said processor comprises:

detecting a trouble of said manufacturing apparatus based on an operation content of said manufacturing unit controlled based on at least one of said received software and recipe information;

transmitting a content of said detected trouble via the communication network, and prompting presentation of at least one of the recipe information and software for solving the trouble; and

operating said manufacturing unit based on at least one of said presented recipe information and software.

18. The control method of the manufacturing apparatus according to claim 15, wherein said processor comprises:

detecting a trouble of said manufacturing apparatus based on an operation content of said manufacturing unit controlled based on at least one of said received software and the recipe information;

transmitting a content of said detected trouble via the communication network, and prompting presentation of at least one of the recipe information and software for solving the trouble;

operating said manufacturing unit based on at least one of said presented recipe information and software; and

judging a cause of said trouble based on an operation content of said manufacturing unit.

15. A control method of a manufacturing apparatus comprising a manufacturing unit, a processor to control the manufacturing unit, and an interface which is connected to the processor and which transmits and receives the information to and from a communication network, said method comprising:

receiving at least one of software and recipe information to control the manufacturing apparatus from said communication network via said interface; and

controlling said manufacturing apparatus based on at least one of said received software and the recipe information.

19. A computer readable recording medium in which a control program of a manufacturing apparatus is recorded to realize:

a function to cause the manufacturing apparatus including receiving unit to request connection via a communication network;

a function to cause to transmit identification information in accordance with request of the identification information form the receiving unit; and

a function to cause to transmit at least one of recipe information and software to control the manufacturing apparatus.

20. A computer readable recording medium in which a program for controlling a manufacturing apparatus comprising a manufacturing unit, a processor to control the manufacturing unit, and an interface connected to the processor to transmit/receive information with a communication network is recorded to realize:

a function to cause to receive at least one of software and recipe information to control the manufacturing apparatus from said communication network via said interface; and

a function to cause to control said manufacturing apparatus based on at least one of said software and recipe information.