High precision accelerometer
First Claim
Patent Images
1. An accelerometer with more than one sensing element wherein said more than one sensing elements are electrically interconnected together.
0 Assignments
0 Petitions
Accused Products
Abstract
The present invention provides an accelerometer which is more manufacturable, higher performance, and more survivable. This invention is particularly applicable for ultra-low-g sensors and ultra-high-g sensors.
49 Citations
17 Claims
- 1. An accelerometer with more than one sensing element wherein said more than one sensing elements are electrically interconnected together.
-
13. A method of fabricating an accelerometer wherein more than one sensing elements are electrically interconnected together.
Specification