Semiconductor structure suitable for forming a solar cell, device including the structure, and methods of forming the device and structure

• US 20020144725A1
• Filed: 04/10/2001
• Published: 10/10/2002
• Est. Priority Date: 04/10/2001
• Status: Abandoned Application

• Current Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Droopad, Ravindranath, Jordan, Dirk C., Barenburg, Barbara Foley
• Application Number:
  US09/832,354
• Publication Number:
  US 20020144725A1
• Time in Patent Office: Days
• US Class Current: 136/247
• CPC Class Codes: H01L 21/02197 the material having a perovskite structure, e.g. BaTiO3
• CPC Class Codes: H01L 21/02293 formation of epitaxial layers by a deposition process epitaxial growth per se C30B
• CPC Class Codes: H01L 21/31641 Deposition of Zirconium oxides, e.g. ZrO2
• CPC Class Codes: H01L 21/31645 Deposition of Hafnium oxides, e.g. HfO2
• CPC Class Codes: H01L 31/02167 for solar cells
• CPC Class Codes: H01L 31/055 where light is absorbed and re-emitted at a different wavelength by the optical element directly associated or integrated with the PV cell, e.g. by using luminescent material, fluorescent concentrators or up-conversion arrangements
• CPC Class Codes: H01L 31/0725 Multiple junction or tandem solar cells
• CPC Class Codes: H01L 31/0735 comprising only AIIIBV compound semiconductors, e.g. GaAs/AlGaAs or InP/GaInAs solar cells
• CPC Class Codes: H01L 31/1836 comprising a growth substrate not being an AIIBVI compound
• CPC Class Codes: H01L 31/1852 comprising a growth substrate not being an AIIIBV compound
• CPC Class Codes: Y02E 10/52 PV systems with concentrators
• CPC Class Codes: Y02E 10/544 Solar cells from Group III-V materials

Abstract

Solar cell structures (100) including high quality epitaxial layers of monocrystalline semiconductor materials that are grown overlying monocrystalline substrates (102) such as large silicon wafers by forming a compliant substrate for growing the monocrystalline layers are disclosed. One way to achieve the formation of a compliant substrate includes first growing an accommodating buffer layer (104) on a silicon wafer. The accommodating buffer (104) layer is a layer of monocrystalline material spaced apart from the silicon wafer by an amorphous interface layer (112) of silicon oxide. The amorphous interface layer (112) dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer. The solar cell structures also include a dye (110) to increase an efficiency of the solar cell.

Claims

1. A solar cell structure comprising:

a monocrystalline substrate;

an accommodating buffer layer formed on the substrate;

a template formed on the accommodating buffer layer;

a first monocrystalline semiconductor layer formed overlying the template; and

a dye proximate said monocrystalline semiconductor layer.

2. The semiconductor structure of claim 1, further comprising a biomolecule coupled to the first monocrystalline semiconductor layer and the dye.

3. The semiconductor structure of claim 2, wherein the biomolecule is selected from the group consisting of proteins, DNA, carbohydrates, and amino acids.

4. The semiconductor structure of claim 1, wherein the dye comprises a fluorescent material.

5. The semiconductor structure of claim 4, wherein the fluorescent material comprises a fluorophore.

6. The semiconductor structure of claim 1, further comprising a surfactant.

7. The semiconductor structure of claim 6, wherein the surfactant comprises at least one of Al, In, and Ga.

8. The semiconductor structure of claim 6, wherein the template layer further comprises a capping layer.

9. The semiconductor structure of claim 8, wherein the capping layer comprises at least one of As, P, Sb, and N.

10. The semiconductor structure of claim 8, wherein the surfactant comprises Al, the capping layer comprises Al₂Sr, and the first monocrystalline semiconductor layer comprises GaAs.

11. The semiconductor structure of claim 1, wherein the accommodating buffer layer comprises an oxide selected from the group consisting of alkaline earth metal titanates, alkaline earth metal zirconates, alkaline earth metal hafniates, alkaline earth metal tantalates, alkaline earth metal ruthenates, and alkaline earth metal niobates.

12. The semiconductor structure of claim 1, wherein the accommodating buffer layer comprises Sr_xBa_1-xTiO₃ where x ranges from 0 to 1.

13. The semiconductor structure of claim 1, wherein the accommodating buffer layer comprises an oxide formed as a monocrystalline oxide and subsequently heat treated to convert the monocrystalline oxide to an amorphous oxide.

14. The semiconductor structure of claim 1, further comprising a amorphous oxide layer formed between the first monocrystalline semiconductor layer and the accommodating buffer layer.

15. The semiconductor structure of claim 14, wherein the monocrystalline substrate comprises silicon and the amorphous oxide layer comprises a silicon oxide.

16. The semiconductor structure of claim 1, wherein the accommodating buffer layer is conductive.

17. The semiconductor structure of claim 1, wherein the first monocrystalline semiconductor layer is a compound semiconductor material selected from the group consisting of:

III-V compounds, mixed III-V compounds, II-VI compounds, and mixed II-VI compounds.

18. The semiconductor structure of claim 1, wherein the first monocrystalline semiconductor layer comprises a material selected from the group consisting of:

GaAs, AlGaAs, InP, InGaAs, InGaP, InGaAsP, AlInP, and GaInP.

19. The semiconductor structure of claim 1, further comprising a second monocrystalline semiconductor layer adjacent the first monocrystalline semiconductor layer, wherein a combination of the first monocrystalline semiconductor layer and the second monocrystalline semiconductor layer form a p-n junction.

20. The semiconductor structure of claim 19, wherein the first monocrystalline semiconductor layer comprises GaAs of a first dopant type and the second monocrystalline semiconductor layer comprises GaAs of a second dopant type.

21. The semiconductor structure of claim 1, further comprising a plurality of p-n junctions interposed between the dye and the first monocrystalline semiconductor layer.

22. The semiconductor structure of claim 21, wherein the plurality of p-n junctions comprise semiconductor layers GaAs and GaInP.

23. The semiconductor structure of claim 1, further comprising a p-n junction formed within the monocrystalline substrate.

24. The semiconductor structure of claim 1, further comprising a conductive material layer adjacent and in contact with the monocrystalline substrate.

25. The semiconductor structure of claim 24, wherein the conductive material includes a metal.

26. The semiconductor structure of claim 1, wherein the accommodating buffer layer has a thickness of about 2-10 nm.

27. The semiconductor structure of claim 1, further comprising a microelectronic device formed using the monocrystalline substrate.

28. The semiconductor device of claim 27, wherein the microelectronic device includes a charge controller.

29. The semiconductor device of claim 27, wherein the microelectronic device includes an inverter.

30. The semiconductor structure of claim 1, further comprising a first emitter region, a second emitter region, and a base region, wherein the first emitter region is formed on a top portion of the structure and the second emitter and base regions are formed on a bottom portion of the structure.

31. A solar cell formed using the structure of claim 1.

32. A solar cell comprising:

a monocrystalline substrate;

an accommodating buffer structure formed on the substrate;

a monocrystalline semiconductor material of a first type formed overlying the amorphous oxide; and

a dye layer formed over the compound semiconductor material of a first type.

33. The solar cell of claim 32, further comprising a biomolecule coupled to the monocrystalline semiconductor of a first type and the dye.

34. The solar cell of claim 33, wherein the biomolecule is selected from the group consisting of proteins, DNA, carbohydrates, and amino acids.

35. The solar cell of claim 32, wherein the dye comprises a fluorescent material.

36. The solar cell of claim 35, wherein the fluorescent material comprises a fluorophore.

37. The solar cell of claim 32, further comprising a plurality of semiconductor layers interposed between the dye and the monocrystalline semiconductor material of a first type, wherein the plurality of semiconductor layers form a plurality of p-n junctions.

38. The solar cell of claim 37, wherein the plurality semiconductor layers comprise a p+ GaAs layer, an n−

GaInP layer, a p−

GaAs layer, an n−

GaAs layer, an n−

GaInP layer, an n++ GaAs layer, a p++ GaAs layer, a p−

GaInP layer, a p−

GaInP layer, an n−

GaInP layer, an n−

AlInP layer, and an n++ GaAs layer.

39. The solar cell of claim 37, wherein the plurality semiconductor layers comprise a material selected from the group consisting of GaAs, AlGaAs, and InGaAs.

40. The solar cell of claim 32, wherein the monocrystalline substrate comprises silicon.

41. The solar cell of claim 32, wherein the monocrystalline substrate comprises a p-n junction.

42. The solar cell of claim 32, further comprising a conductive layer adjacent and in contact with the monocrystalline substrate.

43. The solar cell of claim 32, wherein the accommodating buffer structure is amorphous.

44. The solar cell of claim 32, wherein the accommodating buffer structure is monocrystalline.

45. The solar cell of claim 32, wherein the accommodating buffer structure is conductive.

46. The solar cell of claim 32, wherein the dye layer is configured to receive light of a first wavelength and emit light of a second wavelength, wherein the light of the second wavelength is more efficiently converted into electricity by the solar cell.

48. The process of claim 47, wherein the step of providing includes providing a silicon substrate.

49. The process of claim 47, further comprising the step of exposing a portion of the structure to an anneal process to convert the monocrystalline accommodating buffer layer to an amorphous structure.

50. The process of claim 47, further comprising the step of forming an amorphous layer between the accommodating buffer layer and the monocrystalline substrate.

51. The process of claim 47, wherein the step of forming a dye layer includes attaching a biomolecule to a surface of the first monocrystalline semiconductor material.

52. The process of claim 51, wherein the step of attaching includes attaching a compound including at least one of a protein molecule, a DNA molecule, a carbohydrate molecule, and a amino acid molecule to a surface of the first monocrystalline semiconductor material.

53. The process of claim 47, wherein the step of forming a dye layer includes attaching a fluorescent material to a surface of the first monocrystalline semiconductor material.

54. The process of claim 53, wherein the step of attaching includes attaching a flurophore to a surface of the first monocrystalline semiconductor material.

47. A process for fabricating a solar cell structure comprising the steps of:

providing a monocrystalline substrate;

epitaxially growing a monocrystalline accommodating buffer layer overlying the monocrystalline substrate;

epitaxially growing a first monocrystalline semiconductor material over the monocrystalline accommodating buffer layer; and

forming a dye layer overlying the first monocrystalline semiconductor material.