Methods of manufacturing microfabricated substrates
First Claim
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1. A method of fabricating microfluidic devices comprising:
- providing a first substrate and a second substrate, wherein the second substrate has a plurality of apertures;
applying a vacuum to the apertures to hold the first substrate in contact with the second substrate; and
bonding the first substrate to the second substrate.
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Abstract
The present invention is directed to improved methods and apparatuses for manufacturing microfabricated devices, and particularly, microfluidic devices. In general the methods and apparatuses of the invention provide improved methods of bonding substrates together by applying a vacuum to the space between the substrates during the bonding process.
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18 Claims
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1. A method of fabricating microfluidic devices comprising:
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providing a first substrate and a second substrate, wherein the second substrate has a plurality of apertures;
applying a vacuum to the apertures to hold the first substrate in contact with the second substrate; and
bonding the first substrate to the second substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification