Method of and apparatus for fluid sealing, while electrically contacting, wet-processed workpieces, as in the electrodeposition of semi-conductor wafers and the like and for other wet processing techniques and workpieces

• US 20020144900A1
• Filed: 04/05/2001
• Published: 10/10/2002
• Est. Priority Date: 04/05/2001
• Status: Active Grant

• Current Assignee: Tel Nexx, Inc. (Tokyo Electron Limited)
• Original Assignee: All Wet Technologies, Inc. (ASMPT Ltd.)
• Inventors: Keigler, Arthur
• Granted Patent: US 6,540,899 B2
• Time in Patent Office: Days
• US Class Current: 204/297.05
• CPC Class Codes: C25D 17/001 Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
• CPC Class Codes: C25D 17/004 Sealing devices
• CPC Class Codes: C25D 17/06 Suspending or supporting devices for articles to be coated
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28

Abstract

A method and apparatus for fluid sealing the underside of a workpiece, such as a semiconductor wafer and the like, during wet-processing such as electrodeposition and the like, employing an elastomeric encased ring of flexible fingers against which the periphery of the workpiece underside is forced to deflect the fingers downwardly and engage a peripheral sealing bead against the underside periphery of the workpiece; and where electrical contact with the workpiece is desired, resiliently engaging electrical contact tips protruding through peripheral openings in the elastomeric covering within the sealing ring, with the underside periphery of the workpiece.

Claims

1. A method of fluid sealing while electrically contacting the underside perimeter of wet-processed workpieces, that comprises, providing an elastomer-covered ring inwardly terminating in an upwardly projecting peripheral elastomeric sealing bead, and covering an assembly of inwardly extending flexible fingers each having an upwardly projecting terminal electrical contact and upon the elastomer-covered inner ends of which fingers the perimeter of the underside of the workpiece is to engage along the sealing bead during the wet processing of the workpiece;

resting the underside of the workpiece within the ring and forcing the underside periphery of the workpiece against the sealing bead and the inner ends of the elastomer-covered finger assembly, with said inner ends flexibly deflecting downwardly and resiliently creating a fluid seal around the workpiece-underside periphery at the sealing bead;

providing a ring of peripheral openings in the elastomeric covering of the fingers inward of the sealing bead and exposing the electrical contact tips of the fingers therethrough such that, during the downward deflecting of the fingers, their contact tips make resilent electrical contact with the underside periphery of the workpiece inward of the sealing bead.

2. The method of claim 1 wherein during said downward deflecting, the contact tips resiliently wipe clean the underside periphery of the workpiece as electrical contact is established.

3. The method of claim 1 wherein the fingers deflect independently insuring a uniform electrical contact all around the periphery of the workpiece.

4. The method of claim 1 wherein the workpiece is a thin circular wafer, and the fingers of said assembly extend radically inwardly of the periphery thereof.

5. A method of fluid sealing the underside perimeter of wet-processed workpieces, that comprises, providing an elastomer-covered ring inwardly terminating in an upwardly projecting peripheral elastomeric sealing bead, and covering an assembly of inwardly extending flexible fingers upon the elastomer-covered inner ends of which fingers the perimeter of the underside of the workpiece is to engage along the sealing bead during the wet processing of the workpiece;

resting the underside of the workpiece within the ring; and

forcing the underside periphery of the workpiece against the sealing bead and the inner ends of the elastomer-covered finger assembly, with said inner ends flexibly deflecting downwardly and resiliently creating a fluid seal around the workpiece-underside periphery at the sealing bead;

6. Apparatus for fluid sealing while electrically contacting the underside perimeter of wet-processed workpieces, having, in combination, an elastomer-covered ring inwardly terminating in an upwardly projecting peripheral elastomeric sealing bead and covering an assembly of inwardly extending flexible fingers each having an upwardly projecting terminal electrical contact and upon the elastomer-covered inner ends of which fingers the perimeter of the underside of the workpiece is to engage along the sealing bead during the wet processing of the workpiece;

with the underside of the workpiece placed within the ring, means for forcing the underside periphery of the workpiece against the sealing bead and the inner ends of the elastomer-covered finger assembly, with said inner ends flexibly deflecting downwardly and resiliently creating a fluid seal around the workpiece-underside periphery at the sealing bead;

a ring of peripheral openings formed in the elastomeric covering of the fingers inward of the sealing bead and exposing the electrical contact tips of the fingers there through such that, during the downward deflecting of the fingers, their contact tips make resilent and electrical contact with the underside periphery of the workpiece inward of the sealing bead.

7. The apparatus of claim 6 wherein during said downward deflecting, the contact tips resiliently wipe clean the underside periphery of the workpiece as electrical contact is established.

8. The apparatus of claim 6 wherein the fingers deflect independently insuring a uniform electrical contact all around the periphery of the workpiece

9. The apparatus of claim 6 wherein the workpiece is a thin circular wafer and the fingers of said assembly extend radially inwardly of the periphery thereof.

10. The apparatus of claim 6 wherein the fingers extend radially from a thin flexible flexure plate backed by a thicker stiff support plate inwardly of the fingers, and molded integrally within the elastomeric covering.

11. The apparatus of claim 10 wherein the fingers are thinner than the flexure plate from which they radially extend.

12. Apparatus for fluid sealing the underside perimeter of wet-processed workpieces, having, in combination, an elastomer-covered ring inwardly terminating in an upwardly projecting peripheral elastomeric sealing bead and covering an assembly of inwardly extending flexible fingers upon the elastomer-covered inner ends of which fingers the perimeter of the underside of the workpiece is to engage along the sealing bead during the wet processing of the workpiece;

with the workpiece resting within the ring, means for forcing the underside periphery of the workpiece against the sealing bead and the inner ends of the elastomer-covered finger assembly, with said inner ends flexibly deflecting downwardly and resiliently creating a fluid seal around the workpiece underside periphery at the sealing bead.

13. A method of fluid sealing while electrically contacting at or near the perimeter of wet-processed workpieces, that comprises, providing an elastomer-covered ring inwardly terminating a upwardly projecting peripheral elastomeric sealing bead, and covering an assembly of inwardly extending flexible fingers each having a projecting terminal electrical contact and upon the elastomer-covered inner ends of which fingers the perimeter of the workpiece is to engage along the sealing bead during the wet processing of the workpiece;

resting the workpiece within the ring and forcing the periphery of the workpiece against the sealing bead and the inner ends of the elastomer-covered finger assembly, with said inner ends flexibly deflecting and resiliently creating a fluid seal around the workpiece periphery at the sealing bead;

providing a ring of peripheral openings in the elastomeric covering of the fingers inward of the sealing bead and exposing the electrical contact tips of the fingers therethrough such that, during the deflecting of the fingers, the contact tips make resilient electrical contact with the periphery of the workpiece inward of the sealing bead.