Lithographic projection apparatus positioning system, method of manufacturing, device manufactured thereby and computer program
First Claim
1. A lithographic projection apparatus comprising:
- a radiation system to provide a projection beam of radiation;
a support structure to support patterning structure, the patterning structure serves to pattern the projection beam according to a desired pattern;
a substrate table to hold a substrate;
a positioning system to position at least one of said support structure and said substrate table, said positioning system comprising a planar motor having a stator and a translator, one of said stator and said translator comprising a periodic magnet structure and the other of said stator and said translator comprising a plurality of energizable coils, said coils when energized in turn with an oscillating signal causing vibrations of said translator, said vibrations having an amplitude less than the period of said periodic magnet structure;
a projection system to project the patterned beam onto a target portion of said substrate; and
a vibration measurer to measure said vibrations of said translator and to determine the phase relationship between said translator and said stator on the basis of said measured vibrations.
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Accused Products
Abstract
A lithographic apparatus has a positioning system for positioning an object table, said positioning system comprising a planar motor having a stator and a translator, one of said stator and said translator comprising a periodic magnet structure and the other of said stator and said translator comprising a plurality of energizable coils. The phase relationship between stator and translator of the planar motor is determined by energizing a plurality of said energizable coils in turn with an oscillating signal sufficient to cause vibrations of said translator having an amplitude less than the period of said periodic magnet structure, measuring said vibrations of said translator, and determining the phase relationship between said translator and said stator on the basis of said measured vibrations.
Alternatively, the relationship between stator and translator is be determined by detecting means detecting distinct optical marks on the periodic magnet array. Control means determine the relationship between said translator and said stator on the basis of detected distinct optical marks.
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Citations
13 Claims
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1. A lithographic projection apparatus comprising:
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a radiation system to provide a projection beam of radiation;
a support structure to support patterning structure, the patterning structure serves to pattern the projection beam according to a desired pattern;
a substrate table to hold a substrate;
a positioning system to position at least one of said support structure and said substrate table, said positioning system comprising a planar motor having a stator and a translator, one of said stator and said translator comprising a periodic magnet structure and the other of said stator and said translator comprising a plurality of energizable coils, said coils when energized in turn with an oscillating signal causing vibrations of said translator, said vibrations having an amplitude less than the period of said periodic magnet structure;
a projection system to project the patterned beam onto a target portion of said substrate; and
a vibration measurer to measure said vibrations of said translator and to determine the phase relationship between said translator and said stator on the basis of said measured vibrations. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A positioning system to position an object, said positioning system comprising:
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a planar motor having a stator and a translator, one of said stator and said translator comprising a periodic magnet structure and the other of said stator and said translator comprising a plurality of energizable coils, said coils energized in turn with an oscillating signal sufficient to cause vibrations of said translator, said vibrations having an amplitude less than the period of said periodic magnet structure; and
a vibration measurer to measure said vibrations of said translator and determine the phase relationship between said translator and said stator on the basis of said measured vibrations.
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11. A device manufacturing method using a lithographic projection apparatus, the lithographic apparatus including a positioning system to position at least one of a support structure to support patterning structure and a substrate table, said positioning system comprising a planar motor having a stator and a translator, one of said stator and said translator comprising a periodic magnet structure and the other of said stator and said translator comprising a plurality of energizable coils, the method comprising:
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providing a substrate that is at least partially covered by a layer of radiation-sensitive material;
providing a projection beam of radiation using a radiation system;
using patterning structure to endow the projection beam with a pattern in its cross-section;
projecting the patterned beam of radiation onto a target portion of the layer of radiation-sensitive material;
energizing a plurality of said coils in turn with an oscillating signal sufficient to cause vibrations of said translator having an amplitude less than the period of said periodic magnet structure;
measuring said vibrations of said translator; and
determining the phase relationship between said translator and said stator on the basis of said measured vibrations. - View Dependent Claims (12)
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13. A computer program to determine the phase relationship of a stator and a translator in a lithographic projection apparatus, the lithographic projection apparatus including a positioning system to position at least one of a substrate table and a support structure to support patterning structure, said positioning system comprising a planar motor having a stator and a translator, one of said stator and said translator comprising a periodic magnet structure and the other of said stator and said translator comprising a plurality of energizable coils, the computer program comprising program code to, when executed on a computer, perform the method of:
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energizing a plurality of said coils in turn with an oscillating signal sufficient to cause vibrations of said translator, said vibrations having an amplitude less than the period of said periodic magnet structure;
measuring said vibrations of said translator; and
determining the phase relationship between said translator and said stator on the basis of said measured vibrations.
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Specification