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Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces

  • US 20020148560A1
  • Filed: 11/01/2001
  • Published: 10/17/2002
  • Est. Priority Date: 01/30/2001
  • Status: Active Grant
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1. A method for shaping surfaces comprising the steps of using reactive atom plasma processing for shaping damage free surfaces.

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