Self-coplanarity bumping shape for flip chip
First Claim
1. A stud bump structure, comprising a base portion, affixed to a first member of an interconnect pair, and a stem portion, wherein the stem portion has a transverse planar top surface configured to contact a metal pad on a second member of the interconnect pair, and wherein the stem portion is more compliant than the base portion.
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Accused Products
Abstract
A stud bump structure for electrical interconnection between a pair of members includes a base portion, and a stem portion. The base portion is affixed to a pad or trace in one of the pair of members to be interconnected (such as an integrated circuit chip), and the stem end is configured to contact a metal pad on the other member (such as a printed circuit board) to complete the interconnect. According to the invention, the stem end is truncated to form a transverse plane, and the stem is more compliant than the base. Also, a method for forming a stud bump on a contact surface, includes forming a bump base portion on the surface, drawing out a generally conical tail from a top of the base, and truncating the tail to form a stem portion having a planar transverse top surface and having a length from the top of the base portion to the top surface. In some embodiments the tail portion, at least, of the stud bump is formed using a wire bonding tool. Also, a method for forming an interconnect between a first member and a second member of an electronic package includes providing one of the members with the stud bumps of the invention and then bringing the corresponding bumps and pads together in a bonding process, the compliance of the stems portions of the bumps accommodating the variance from coplanarity of the pad surfaces.
53 Citations
22 Claims
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1. A stud bump structure, comprising
a base portion, affixed to a first member of an interconnect pair, and a stem portion, wherein the stem portion has a transverse planar top surface configured to contact a metal pad on a second member of the interconnect pair, and wherein the stem portion is more compliant than the base portion.
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15. A method for forming a stud bump on a contact surface, comprising forming a bump base portion on the surface, drawing out a generally conical tail from a top of the base, and truncating the tail to form a stem portion having a planar transverse top surface and having a length from the top of the base portion to the top surface.
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19. A method for forming an interconnect between a first member and a second member of an electronic package, comprising
providing a plurality of stud bumps on contact sites at specified locations on the first member, the stud bumps each having a base portion and having a stem portion that is more compliant than the base portion, the stem portion having a transverse planar top surface; -
providing a second member having a plurality of bonding pads at specified locations on a surface of the second member, the respective specified locations on the first and second members corresponding;
apposing the first and second members such that the corresponding bumps and pads are aligned; and
bringing the first and second members together under conditions that promote bonding of the pumps onto the respective metal pads.
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22. A method for making a flip chip semiconductor device package, comprising
providing a plurality of stud bumps on contact sites at specified locations on an integrated circuit chip, the stud bumps each having a base portion and having a stem portion that is more compliant than the base portion, the stem portion having a transverse planar top surface; -
providing a substrate having a plurality of bonding pads at specified locations on a surface of the substrate, the respective specified locations on the integrated circuit chip and the substrate corresponding;
apposing the integrated circuit chip and the substrate such that the corresponding bumps and pads are aligned; and
bringing the integrated circuit chip and the substrate together under conditions that promote bonding of the pumps onto the respective metal pads.
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Specification