Concurrent control of semiconductor parametric testing
First Claim
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1. An automated semiconductor parametric test system, comprising:
- a control module operable to control concurrently operation of semiconductor test equipment and operation of parametric test instrumentation.
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Abstract
An automated semiconductor parametric test system has a control module that is operable to concurrently control both operation of semiconductor test equipment and operation of parametric test instrumentation. A state oscillator module is controlled by the control module, and further may be operated by the control module in some embodiments to control the state of other system modules in synchronization with other system events. A parametric test equipment module facilitates control of the semiconductor parametric test equipment, and a test instrumentation module facilitates control of the parametric test instrumentation.
85 Citations
58 Claims
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1. An automated semiconductor parametric test system, comprising:
a control module operable to control concurrently operation of semiconductor test equipment and operation of parametric test instrumentation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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14. An automated semiconductor parametric test system, comprising:
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a control module operable to control concurrently operation of semiconductor test equipment and operation of parametric test instrumentation;
a state oscillator module, the state oscillator module controlled by the control module and operable to control the state of other system modules;
a parametric test equipment module, the parametric test equipment module operable to facilitate control of the semiconductor parametric test equipment; and
a test instrumentation module, the test instrumentation module operable to facilitate control of the parametric test instrumentation.
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15. An automated semiconductor parametric test system, comprising:
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a control module operable to control concurrently motion of semiconductor test equipment and operation of parametric test instrumentation, the control module implemented in software executing on a computerized system;
a state oscillator module, the state oscillator module controlled by the control module and operable to control the state of other system modules in synchronization with other system events;
a parametric test equipment module, the parametric test equipment module operable to facilitate control of the semiconductor parametric test equipment, wherein the semiconductor parametric test equipment comprises at least one of a wafer loader, a wafer positioner, a wafer chuck, a wafer tray loader, and a prober; and
a test instrumentation module, the test instrumentation module operable to facilitate control of the parametric test instrumentation, wherein the parametric test instrumentation comprises at least one of a test probe and a semiconductor test parameter module.
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16. An automated semiconductor parametric test system controller, comprising:
a control module operable to control concurrently operation of semiconductor test equipment and operation of parametric test instrumentation.
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27. An automated semiconductor parametric test system controller, comprising:
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a control module operable to control concurrently operation of semiconductor test equipment and operation of parametric test instrumentation;
a state oscillator module, the state oscillator module controlled by the control module and operable to control the state of other system modules;
a parametric test equipment module, the parametric test equipment module operable to facilitate control of the semiconductor parametric test equipment; and
a test instrumentation module, the test instrumentation module operable to facilitate control of the parametric test instrumentation.
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28. An automated semiconductor parametric test system controller, comprising:
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a control module operable to control concurrently motion of semiconductor test equipment and operation of parametric test instrumentation, the control module implemented in software executing on the semiconductor parametric test system controller;
a state oscillator module, the state oscillator module controlled by the control module and operable to control the state of other system modules in synchronization with other system events;
a parametric test equipment module, the parametric test equipment module operable to facilitate control of the semiconductor parametric test equipment, wherein the semiconductor parametric test equipment comprises at least one of a wafer loader, a wafer positioner, a wafer chuck, a wafer tray loader, and a prober; and
a test instrumentation module, the test instrumentation module operable to facilitate control of the parametric test instrumentation, wherein the parametric test instrumentation comprises at least one of a test probe and a semiconductor test parameter module.
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29. A method of controlling a semiconductor parametric test system, comprising:
controlling concurrently via a control module operation of semiconductor test equipment and operation of parametric test instrumentation.
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42. A method of controlling a semiconductor parametric test system, comprising:
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controlling concurrently via a control module operation of semiconductor test equipment and operation of parametric test instrumentation;
controlling the state of at least one other system module via a state oscillator module, the state oscillator module controlled by the control module;
providing control of the semiconductor parametric test equipment via operation of a parametric test equipment module; and
providing control of the parametric test instrumentation via operation of a test instrumentation module.
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43. A method of controlling a semiconductor parametric test system, comprising:
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controlling concurrently, via a control module implemented in software and executing on a computerized system, motion of semiconductor test equipment and operation of parametric test instrumentation;
controlling the state of at least one other system module via a state oscillator module, the state oscillator module controlled by the control module and operable to control the state of other system modules in synchronization with other system events;
providing control of the semiconductor parametric test equipment via operation of a parametric test equipment module, wherein the semiconductor parametric test equipment comprises at least one of a wafer loader, a wafer positioner, a wafer chuck, a wafer tray loader, and a prober; and
providing control of the parametric test instrumentation via operation of a test instrumentation module, wherein the parametric test instrumentation comprises at least one of a test probe and a semiconductor test parameter module.
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44. A machine-readable medium with instructions stored thereon, the instructions when executed operable to cause a computerized system to control a semiconductor parametric test system by:
controlling concurrently via a control module operation of semiconductor test equipment and operation of parametric test instrumentation. - View Dependent Claims (45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56)
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57. A machine-readable medium with instructions stored thereon, the instructions when executed operable to cause a computerized system to control a semiconductor parametric test system by:
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controlling concurrently via a control module operation of semiconductor test equipment and operation of parametric test instrumentation;
controlling the state of at least one other system module via a state oscillator module, the state oscillator module controlled by the control module;
providing control of the semiconductor parametric test equipment via operation of a parametric test equipment module; and
providing control of the parametric test instrumentation via operation of a test instrumentation module.
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58. A machine-readable medium with instructions stored thereon, the instructions when executed operable to cause a computerized system to control a semiconductor parametric test system by:
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controlling concurrently, via a control module implemented in software and executing on a computerized system, motion of semiconductor test equipment and operation of parametric test instrumentation;
controlling the state of at least one other system module via a state oscillator module, the state oscillator module controlled by the control module and operable to control the state of other system modules in synchronization with other system events;
providing control of the semiconductor parametric test equipment via operation of a parametric test equipment module, wherein the semiconductor parametric test equipment comprises at least one of a wafer loader, a wafer positioner, a wafer chuck, a wafer tray loader, and a prober; and
providing control of the parametric test instrumentation via operation of a test instrumentation module, wherein the parametric test instrumentation comprises at least one of a test probe and a semiconductor test parameter module.
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Specification