Scale on an apparatus for measuring displacement

• US 20020152626A1
• Filed: 04/22/2002
• Published: 10/24/2002
• Est. Priority Date: 04/20/2001
• Status: Active Grant

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: Koizumi, Hiroshi, Shinpou, Nobuyuki, Ooyama, Yoshikazu, Takahashi, Seigo, Sasaki, Kouji
• Granted Patent: US 6,675,491 B2
• Time in Patent Office: Days
• US Class Current: 33/706
• CPC Class Codes: G01B 3/205 provided with a counter for digital indication of the measured dimension

Abstract

A scale on an apparatus for measuring displacement is enclosed which comprises a scale member having a plural of rectangular gratings arranged with periodic pattern on the glass epoxy substrate and the like, a coating layer covered on the side of the scale member which a plural of the rectangular gratings are formed, a scale cover (film layer) which functions as a protective layer and a scale forming material bonded to the outer portion of the coating layer through an adhesive layer so as to keep contaminant, oil or particles from intruding between the rectangular grating and the adhesive layer such as an adhesive tape and the like.

Claims

1. A scale on apparatus for measuring a displacement, comprising:

a scale member including a plural of gratings formed at least on the top surface of the scale substrate, a coating layer covering the side on which said grating are formed, and a scale cover covering with a bonding layer on said coating layer which covers on said grating formed on said substrate.

2. A scale on apparatus for measuring a displacement according to claim 1 wherein said coating layer is radiated by plasma to its facing surface to the scale cover for rough surface thereon.

3. A scale on apparatus for measuring a displacement according to claim 1 wherein said coating layer is Polyimid and other Epoxy system material.

4. A scale on apparatus for measuring a displacement according to claim 1 wherein said coating layer is an ultraviolet hardening agent.

5. A scale on apparatus for measuring a displacement according to claim 1 wherein said coating layer is surrounded entirely the scale substrate

6. A scale on apparatus for measuring a displacement according to claim 1 wherein said grating is composed of signal transferring portions and signal non-transferring portions.

7. A scale on apparatus for measuring a displacement according to claim 1 wherein said grating is composed of a magnetic signal transferring portions and magnetic signal non-transferring portions.

8. A scale on apparatus for measuring a displacement according to claim 1 wherein said grating is composed of light transmitting portions and light non-transmitting portions.