Systems and methods of monitoring thin film deposition
First Claim
1. A system for monitoring a thin film deposition, comprising a thin film deposition sensor comprising an acoustical resonator having an exposed surface and being responsive to thin film material deposits on the exposed surface.
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Accused Products
Abstract
Systems and methods of monitoring thin film deposition are described. In one aspect, a thin film deposition sensor includes an acoustical resonator (e.g., a thin film bulk acoustical resonator) that has an exposed surface and is responsive to thin film material deposits on the exposed surface. A substrate clip may be configured to attach the thin film deposition sensor to a substrate. A transceiver circuit may be configured to enable the thin film deposition sensor to be interrogated wirelessly. A method of monitoring a thin film deposition on a substrate also is described.
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Citations
20 Claims
- 1. A system for monitoring a thin film deposition, comprising a thin film deposition sensor comprising an acoustical resonator having an exposed surface and being responsive to thin film material deposits on the exposed surface.
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8. A system for monitoring a thin film deposition on a substrate, comprising:
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a thin film deposition sensor having an exposed surface exposed and being responsive to thin film material deposits on the exposed surface; and
a substrate clip configured to attach the thin film deposition sensor to the substrate. - View Dependent Claims (9, 10, 11, 13, 14, 15, 17, 18, 19, 20)
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12. A system for monitoring a thin film deposition, comprising:
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a thin film deposition sensor having an exposed surface exposed and being responsive to thin film material deposits on the exposed surface; and
a transceiver circuit configured to enable the thin film deposition sensor to be interrogated wirelessly.
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16. A method of monitoring a thin film deposition on a substrate, comprising:
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disposing within a deposition chamber a thin film deposition sensor comprising an acoustical resonator; and
exposing a surface of the acoustical resonator to a thin film deposition.
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Specification