Mars optical modulators
First Claim
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1. An electrooptic device comprising:
- a. an electrically conductive substrate having a surface s1, b. a movable membrane having a top surface and a bottom surface s2, the movable membrane comprising a single crystal silicon layer, c. a support for positioning the movable membrane at a first position spaced from said substrate by an air gap d1 between surface s1 and s2, and d. means for applying an electrical bias across the air gap to move the movable membrane from the first position to a second position having an air gap d2.
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Abstract
The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made of single crystal silicon.
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Citations
17 Claims
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1. An electrooptic device comprising:
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a. an electrically conductive substrate having a surface s1, b. a movable membrane having a top surface and a bottom surface s2, the movable membrane comprising a single crystal silicon layer, c. a support for positioning the movable membrane at a first position spaced from said substrate by an air gap d1 between surface s1 and s2, and d. means for applying an electrical bias across the air gap to move the movable membrane from the first position to a second position having an air gap d2. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for modulating light comprising:
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a. directing a beam of light with a wavelength λ
on a substrate,b. providing a movable membrane spaced from said substrate, the movable membrane consisting of single crystal silicon, c. providing a support for positioning said optically transparent portion of said membrane at a first position spaced from said substrate and defining an air gap d1, and a second position spaced from said substrate defining an air gap d2, and d. applying an electrical bias across said air gap to move said optically transparent portion of said membrane from said first position to said second position. - View Dependent Claims (11, 12, 15, 16, 17)
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13. A method for fabricating an electrooptic modulator comprising the steps of:
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a. providing a substrate comprising;
i. a silicon substrate, ii. an SiO2 layer on the substrate, iii. a single crystal silicon layer on the SiO2 layer, b. masking the single crystal layer with a mask having a central membrane feature and at least two arms extending from said central membrane feature to a peripheral frame, leaving exposed portions corresponding with spaces between said arms, c. etching through the single crystal silicon layer etch using the mask as an etch mask to form openings corresponding with the spaces between the arms and expose portions of the SiO2 layer in the openings, and d. etching through the SiO2 layer in the exposed portions and under the arms using a wet etchant, thereby forming an air gap between the substrate and the central membrane feature and leaving the central membrane feature supported by the arms.
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14. A method for fabricating a multi-channel equalizer comprising the steps of:
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a. providing a substrate comprising;
i. a silicon substrate, ii. an SiO2 layer on the substrate, iii. a single crystal silicon layer on the SiO2 layer, b. masking the single crystal layer with a mask having a plurality of pairs of parallel elongated slots, each pair of parallel elongated slots defining an individual movable membrane, c. etching through the single crystal silicon layer etch using the mask as an etch mask to form openings corresponding with the pairs of parallel elongated slots, and produce exposed regions of the SiO2 layer, d. etching the exposed regions of the SiO2 layer to form slots in the SiO2 layer corresponding to the slots in the single crystal silicon layer, e. forming electrical contacts on the single crystal silicon layer between each pair of elongated parallel slots, f. forming an electrical contact on the substrate, g. etching the SiO2 layer between the slots in the SiO2 layer to remove the SiO2 layer from beneath the plurality of elongated parallel slots in the single crystal silicon layer, and h. providing electrical isolation around each individual membrane.
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Specification