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Mars optical modulators

  • US 20020154381A1
  • Filed: 04/24/2001
  • Published: 10/24/2002
  • Est. Priority Date: 04/24/2001
  • Status: Abandoned Application
First Claim
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1. An electrooptic device comprising:

  • a. an electrically conductive substrate having a surface s1, b. a movable membrane having a top surface and a bottom surface s2, the movable membrane comprising a single crystal silicon layer, c. a support for positioning the movable membrane at a first position spaced from said substrate by an air gap d1 between surface s1 and s2, and d. means for applying an electrical bias across the air gap to move the movable membrane from the first position to a second position having an air gap d2.

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