Surface micromachined optical system with reinforced mirror microstructure
First Claim
1. A surface micromachined optical system that comprises:
- a first substrate;
a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and
a first actuator interconnected with said first mirror microstructure, wherein said first mirror microstructure comprises;
a first structural layer disposed in spaced relation to said first substrate;
a second structural layer disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate; and
a plurality of first columns that are disposed in spaced relation relative to each other, and further that extend between and fixedly interconnect said first and second structural layers.
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Accused Products
Abstract
Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.
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Citations
66 Claims
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1. A surface micromachined optical system that comprises:
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a first substrate;
a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and
a first actuator interconnected with said first mirror microstructure, wherein said first mirror microstructure comprises;
a first structural layer disposed in spaced relation to said first substrate;
a second structural layer disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate; and
a plurality of first columns that are disposed in spaced relation relative to each other, and further that extend between and fixedly interconnect said first and second structural layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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15. A surface micromachined optical system that comprises:
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a first substrate;
a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and
a first actuator interconnected with said first mirror microstructure, wherein said first mirror microstructure comprises;
a first structural layer disposed in spaced relation to said first substrate;
a second structural layer disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate; and
a plurality of at least generally laterally extending first rails that extend between and fixedly interconnect said first and second structural layers.
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42. A surface micromachined optical system that comprises:
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a first substrate;
a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and
a first actuator interconnected with said first mirror microstructure, wherein said first mirror microstructure comprises;
a first structural layer is disposed in spaced relation to said first substrate;
a second structural layer that is disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate; and
at least one fixed, structural interconnection between said first and second structural layers, wherein said second structural layer comprises an upper surface, wherein a radius of curvature of said upper surface of said second structural layer is at least about 1 meter. - View Dependent Claims (43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62)
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63. A surface micromachined optical system that comprises:
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a first substrate;
a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and
a first actuator interconnected with said first mirror microstructure, wherein said first mirror microstructure comprises;
a first structural layer disposed in spaced relation to said first substrate; and
means for structurally reinforcing said first structural layer to provide a radius of curvature for an upper surface of said first structural layer that is at least about 1 meter.
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64. A surface micromachined optical system that comprises:
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a first substrate;
a first mirror microstructure disposed in spaced relation to said first substrate; and
a first actuator interconnected with said first mirror microstructure, wherein said first mirror microstructure comprises;
a first structural layer is disposed in spaced relation to said first substrate;
a second structural layer that is disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate; and
a first structural member that extends between and fixedly interconnects said first and second structural layers, wherein said first structural member is positioned relative to a center of said second structural layer in a lateral dimension such that a reinforcement ratio is no more than about 0.5, wherein said reinforcement ratio is a ratio of a first distance to a second distance, wherein said first distance is a distance from said center to a portion of said first structural member that is disposed closest to said center, and wherein said second distance is a diameter of said second structural layer.
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65. A surface micromachined optical system that comprises:
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a first substrate;
a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and
a first actuator interconnected with said first mirror microstructure, wherein said first mirror microstructure comprises;
a first structural layer disposed in spaced relation to said first substrate; and
means for structurally reinforcing said first structural layer to a reinforcement ratio of no more than about 0.5, wherein said reinforcement ratio is a ratio of a first distance to a second distance, wherein said first distance is a distance from said center to a portion of said means for structurally reinforcing that is disposed closest to said center, and wherein said second distance is a diameter of said first structural layer.
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66. A surface micromachined optical system that comprises:
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a first substrate;
a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and
a first actuator interconnected with said first mirror microstructure, wherein said first mirror microstructure comprises;
a first structural layer is disposed in spaced relation to said first substrate;
a second structural layer that is disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate;
a first fixed, structural interconnection between said first and second structural layers;
a third structural layer, wherein said second structural layer is disposed between said first and third structural layers; and
a second fixed, structural interconnection between said second and third structural layers.
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Specification