Spin coated media

• US 20020155216A1
• Filed: 04/18/2002
• Published: 10/24/2002
• Est. Priority Date: 04/19/2001
• Status: Abandoned Application

• Current Assignee: Sabic Innovative Plastics IP BV (Government of Saudi Arabia)
• Original Assignee: Sabic Innovative Plastics IP BV (Government of Saudi Arabia)
• Inventors: Dietz, Albert G. III, Cheng, Minquan, Gallucci, Robert R., Gorczyca, Thomas B., Feist, Thomas P., Reitz, John Bradford
• Application Number:
  US10/063,398
• Publication Number:
  US 20020155216A1
• Time in Patent Office: Days
• US Class Current: 427/240
• CPC Class Codes: B05D 1/005 Spin coating
• CPC Class Codes: C03C 17/32 with synthetic or natural resins C03C17/30 takes precedence
• CPC Class Codes: C03C 2218/116 by spin-coating, centrifugation
• CPC Class Codes: G11B 11/10582 Record carriers characterised by the selection of the material or by the structure or form
• CPC Class Codes: G11B 5/84 Processes or apparatus specially adapted for manufacturing record carriers
• CPC Class Codes: G11B 7/24 Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the arrangement of information on the carrier G11B7/007
• CPC Class Codes: G11B 7/2433 Metals or elements of Groups 13, 14, 15 or 16 of the Periodic Table, e.g. B, Si, Ge, As, Sb, Bi, Se or Te
• CPC Class Codes: G11B 7/2472 cyanine
• CPC Class Codes: G11B 7/248 porphines; azaporphines, e.g. phthalocyanines
• CPC Class Codes: G11B 7/252 of layers other than recording layers
• CPC Class Codes: G11B 7/2531 comprising glass
• CPC Class Codes: G11B 7/2532 comprising metals
• CPC Class Codes: G11B 7/2542 consisting essentially of organic resins
• CPC Class Codes: G11B 7/2548 consisting essentially of inorganic materials
• CPC Class Codes: G11B 7/256 of layers improving adhesion between layers
• CPC Class Codes: G11B 7/2578 consisting essentially of inorganic materials
• CPC Class Codes: G11B 7/258 of reflective layers
• CPC Class Codes: G11B 7/266 Sputtering or spin-coating layers sputtering in general C23C14/24; spin-coating in general B05D1/005

Abstract

In one embodiment, a spin coating process comprises: dispensing a solution of a solution solvent and about 3 to about 30 wt % thermoplastic polymer, based upon the total weight of the solution, wherein the solution solvent has a boiling point at atmospheric pressure of about 110° C. to about 250° C., a polarity index of greater than or equal to about 4.0, a pH of about 5.5 to about 9; spinning the substrate; and removing the solution solvent to produce a coated substrate comprising a coating having less than or equal to 10 asperities over the entire surface of the coated substrate.

Claims

1. A spin coating process, comprising:

dispensing a solution of a solution solvent and about 3 to about 30 wt % thermoplastic polymer, based upon the total weight of the solution, wherein the solution solvent has a boiling point at atmospheric pressure of about 110°

C. to about 250°

C., a polarity index of greater than or equal to about 4.0, a pH of about 5.5 to about 9;

spinning the substrate; and

removing the solution solvent to produce a coated substrate comprising a coating having less than or equal to 10 asperities over the entire surface of the coated substrate.

3. The process of claim 1, where the thermoplastic polymer has a Tg about 200 to about 260°

C.

4. The process of claim 1, where the thermoplastic polymer has less than or equal to about 20 meq/Kg of functional groups selected from the group consisting of:

carboxylic acids, carboxylic acid salts, carboxylic anhydrides, amines, phenols, alcohols, nitriles, epoxides, oxetanes, isocyanates, cyanurates, oxazoles, cyclobutyl, alkenes, alkynes, and combinations comprising at least one of the foregoing groups.

5. The process of claim 4, where the functional groups comprise carboxylic acid groups.

6. The process of claim 1, where the thermoplastic polymer has a weight average molecular weight, measured determined by GPC using methylene chloride as a GPC solvent, changes by less than or equal to about 10% during the entire process.

7. The process of claim 1, where the thermoplastic polymer is a resin selected from the group consisting of polyimides, polyetherimides, polysulfones, polyethersulfones, polycarbonates, polyester carbonates, polyphenylene ethers, polyarylates, and combinations comprising at least one of the foregoing resins.

8. The process of claim 1 where the solvent is selected from the group consisting of aryl acetates and C₄-C₁₀ alkyl acetates, C_2-C6 alkyl carbonates, formamides, C₁-C6 N-alkyl formamides, C₁-C₆ alkyl sulfoxides, alkoxy alkyl acetates, C₁-C₆ N-alkyl pyrrolidones, phenols, C₁-C₆ alkyl phenols, aryl ethers, C₁-C₆ alky aryl ethers, C₁-C₆ alkyl ureas, C₄-C₆ sulfolanes, N-acetyl cyclic ethers, C₁-C₆ alky acetamides, C₁-C₆ alkyl phosphoramides, C₃-C₆ lactones, aryl alkyl ketones, and miscible combinations comprising at least one of the foregoing solvents.

9. The process of claim 8, where the solvent is selected from the group consisting of butyl acetate, diethyl carbonate, formamide, methyl formamide, dimethyl formamide, dimethyl sulfoxide, methoxy ethyl acetate, N-methyl pyrrolidone, propylene carbonate, anisole, tetra methyl urea, dimethyl urea, sulfolane, methyl anisole, N-acetyl morpholane, dimethyl acetamide, mono methyl acetamide, veratole, hexamethyl phosphoramide, buytrolactone, acetophenone, phenol, cresol, mesitol, xylenol, and miscible combinations comprising at least one of the foregoing solvents.

10. The process of claim 1, wherein the solvent comprises less than or equal to about 1 wt % halogens, based upon the total weight of the solvent.

11. The process of claim 1, wherein the solvent has a dielectric constant of greater than or equal to about 10.

12. The process of claim 1, wherein the solution has a viscosity, as measured by ASTM D1824 at room temperature, of about 1 to about 2,000 Cps.

13. The process of claim 12, wherein the viscosity changes less than or equal to about 25% after heating at 45°

C. for 3 hrs.

14. The process of claim 1, wherein the solution comprises less than or equal to about 0.1 wt % particles having a diameter, measured along a major axis or greater than or equal to about 0.05 micrometers, as determined by laser light scattering.

15. The process of claim 1, wherein the coating comprises a percent haze, as measured by ASTM D1003, of less than or equal to about 1%.

16. The process of claim 1, where the solution has a water content of less than or equal to about 0.5 wt %, based upon the total weight of the solution.

17. The process of claim 1, wherein the coated substrate has a peel strength of greater than or equal to about 1 lb/in.

19. The process of claim 18, further comprising dispensing the solution while moving a dispenser over the substrate via a spiral translation.

20. The process of claim 18, further comprising dispensing the solution while moving a dispenser over the substrate via an arc translation.

21. The process of claim 18, wherein the coating has a roughness of less than or equal to about 5 Å

.

22. The process of claim 18, wherein the coating has a waviness, as measured by a peak to valley deviation over an about 4 mm² area, of about 15 nm or less, has less than or equal to about 3 asperities over the entire surface of the substrate, with an asperity height of less than or equal to about 25 nm.

23. The process of claim 22, wherein the coating has less than or equal to about 1 asperity over the entire surface of the substrate.

24. The process of claim 22, wherein the asperity height is less than or equal to about 15 nm.

25. The process of claim 18, wherein the first solvent has a boiling point of about 125°

C. to about 155°

C.

26. The process of claim 18, wherein the solution comprises about 5 wt % to about 50 wt % of the first solvent, based upon the total weight of the solvent.

27. The process of claim 26, wherein the solution comprises about 25 wt % to about 45 wt % of the first solvent, based upon the total weight of the solvent.

28. The process of claim 18, wherein the first solvent is selected from the group consisting of anisole, dichlorobenzene, xylene, and combinations comprising at least one of the foregoing first solvents.

29. The process of claim 18, wherein the second solvent is selected from the group consisting of cresol, gamma-butyrolactone, acetophenone, N-methylpyrrolidone, and combinations comprising at least one of the foregoing second solvents.

36. A spin coated substrate formed by the process of claim 1.

2. The process of claim 2, where the thermoplastic polymer has a weight average molecular weight of 20,000 to 70,000 Daltons.

18. A spin coating process, comprising:

dispensing a solution onto a substrate, the solution comprising a plastic and a first solvent having a boiling point of about 125°

C. to about 180°

C. and a second solvent having a boiling point of about 190°

C. or greater; and

spinning the substrate to coat the substrate with the solution.

30. A spin coating process, comprising:

spinning a substrate;

dispensing a solution onto the substrate at a first speed while moving a dispenser over the substrate via an arc translation; and

spinning the substrate at a second speed to coat the substrate with the solution;

wherein the first speed is slower than the second speed.

31. The process of claim 30, wherein the coating has a roughness of less than or equal to about 5 Å

.

32. The process of claim 30, wherein the coating has a waviness, as measured by a peak to valley deviation over an about 4 mm² area, of less than or equal to about 15 nm.

33. The process of claim 30, wherein the coating has less than or equal to about 1 asperity over the entire surface of the substrate.

34. The process of claim 33, wherein the coating has an asperity height of less than or equal to about 15 nm.

35. A spin coated substrate formed by the process of claim 30.