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Sensor and method for detecting a superstrate

  • US 20020156588A1
  • Filed: 03/05/2001
  • Published: 10/24/2002
  • Est. Priority Date: 03/05/2001
  • Status: Active Grant
First Claim
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1. An instrument for detecting one or more superstrates, comprising:

  • a transmission line;

    a substrate mounted on an opposite side of said transmission line from said one or more superstrates;

    a plurality of measurement cells formed within said transmission line;

    a microwave source for applying a microwave signal to said transmission line and each of said plurality of measurement cells formed within said transmission line; and

    a detector for detecting said one or more superstrates with respect to said plurality of measurement cells.

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