Transparent conductive film formation process, photovoltaic device production process, transparent conductive film, and photovoltaic device
First Claim
1. A process for forming on a substrate a transparent conductive film having crystallizability, the process comprising:
- a first step of forming a film at a first film formation rate; and
a second step of forming a film at a second film formation rate;
the relationship between film formation rates in the respective steps satisfying;
2≦
(second film formation rate)/(first film formation rate)≦
100.
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Accused Products
Abstract
In a process for forming on a substrate a transparent conductive film having crystallizability, the process comprises a first step of forming a film at a first film formation rate and a second step of forming a film at a second film formation rate, and the relationship between film formation rates in the respective steps satisfies:
2≦(second film formation rate)/(first film formation rate)≦100;
which provides a process for producing a transparent conductive film by a deposition process advantageous for cost reduction, which can form in a short time a transparent conductive film having an uneven surface profile with a high light-confining effect, and can bring about an improvement in photovoltaic performance and enjoy a high mass productivity when applied to the formation of multi-layer structure of photovoltaic devices.
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Citations
14 Claims
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1. A process for forming on a substrate a transparent conductive film having crystallizability, the process comprising:
-
a first step of forming a film at a first film formation rate; and
a second step of forming a film at a second film formation rate;
the relationship between film formation rates in the respective steps satisfying;
2≦
(second film formation rate)/(first film formation rate)≦
100. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification