Structure and method for fabricating high contrast reflective mirrors

• US 20020158265A1
• Filed: 04/26/2001
• Published: 10/31/2002
• Est. Priority Date: 04/26/2001
• Status: Abandoned Application

• Current Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Eisenbeiser, Kurt W.
• Application Number:
  US09/842,735
• Publication Number:
  US 20020158265A1
• Time in Patent Office: Days
• US Class Current: 257/98
• CPC Class Codes: H01L 33/105 with a resonant cavity structure
• CPC Class Codes: H01L 33/465 with a resonant cavity structure
• CPC Class Codes: H01S 5/0261 Non-optical elements, e.g. laser driver components, heaters H01S5/0265 takes precedence
• CPC Class Codes: H01S 5/183 having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]

Abstract

A high contrast reflective mirror includes a plurality of alternating first monocrystalline layers and second monocrystalline layers. The first monocrystalline layers are formed of an oxide material that has a cubic structure and a first index of refraction. The second monocrystalline layers are formed of a semiconductor material that has a second index of refraction. The first index of refraction and the second index of refraction differ by at least about 0.5

Claims

1. A high contrast reflective mirror comprising:

a plurality of alternating first monocrystalline layers and second monocrystalline layers,

wherein said first monocrystalline layers comprise an oxide material having a cubic structure and a first index of refraction;

wherein said second monocrystalline layers comprise a semiconductor material having a second index of refraction, and

wherein said first index of refraction and said second index of refraction differ by at least about 0.5.

2. The high contrast reflective mirror of claim 1, wherein said first index of refraction and said second index of refraction differ by at least about 1.0.

3. The high contrast reflective mirror of claim 1, wherein said first monocrystalline layers comprise an oxide material selected from the group consisting of alkaline earth metal titanates, alkaline earth metal zirconates, alkaline earth metal hafnates, alkaline earth metal tantalates, alkaline earth metal ruthenates, alkaline earth metal niobates and metal oxides.

4. The high contrast reflective mirror of claim 3, wherein said first monocrystalline layers comprise Sr_xB_1-xTiO₃, where x ranges from 0 to 1.

5. The high contrast reflective mirror of claim 1, wherein said second monocrystalline layers comprise one of a semiconductor or compound semiconductor material.

6. The high contrast reflective mirror of claim 5, wherein said second monocrystalline layers comprise a compound semiconductor material selected from the group consisting of GaAs, GaAlAs, InP, GaInAs, GaInP, CdS, CdHgTe, PbSe, PbTe, PbSSe, ZnSe and ZnSeS.

7. The high contrast reflective mirror of claim 1, wherein said first monocrystalline layers are characterized by a first lattice constant and said second monocrystalline layers are characterized by a second lattice constant which is substantially lattice matched to said first lattice constant.

8. A vertical-cavity surface-emitting laser comprising:

a monocrystalline substrate;

a first DBR mirror epitaxially grown overlying said substrate, wherein said first DBR mirror comprises;

a plurality of alternating first monocrystalline layers and second monocrystalline layers,

wherein said first monocrystalline layers comprise an oxide material having a cubic structure and a first index of refraction;

wherein said second monocrystalline layers comprise a semiconductor material having a second index of refraction, and

wherein said first index of refraction and said second index of refraction differ by at least about 0.5;

an active layer epitaxially grown overlying said first DBR mirror; and

a second DBR mirror epitaxially grown overlying said active layer, wherein said second DBR mirror comprises;

a plurality of alternating third monocrystalline layers and fourth monocrystalline layers,

wherein said third monocrystalline layers comprise an oxide material having a cubic structure and a third index of refraction;

wherein said fourth monocrystalline layers comprise a semiconductor material having a fourth index of refraction, and

wherein said third index of refraction and said fourth index of refraction differ by at least about 0.5.

9. The vertical-cavity surface-emitting laser of claim 8, wherein the substrate comprises silicon.

10. The vertical-cavity surface-emitting laser of claim 8, further comprising an amorphous oxide layer overlying said substrate and underlying said first DBR mirror.

11. The vertical-cavity surface-emitting laser of claim 8, further comprising an amorphous oxide layer overlying said active layer and underlying said second DBR mirror.

12. The vertical-cavity surface-emitting laser of claim 8, wherein said first index of refraction and said second index of refraction differ by at least about 1.0.

13. The vertical-cavity surface-emitting laser of claim 8, wherein said third index of refraction and said fourth index of refraction differ by at least about 1.0.

14. The vertical-cavity surface-emitting laser of claim 8, wherein said first monocrystalline layers comprise an oxide selected from the group consisting of alkaline earth metal titanates, alkaline earth metal zirconates, alkaline earth metal hafnates, alkaline earth metal tantalates, alkaline earth metal ruthenates, alkaline earth metal niobates and metal oxides.

15. The vertical-cavity surface-emitting laser of claim 8, wherein said third monocrystalline layers comprise an oxide selected from the group consisting of alkaline earth metal titanates, alkaline earth metal zirconates, alkaline earth metal hafnates, alkaline earth metal tantalates, alkaline earth metal ruthenates, alkaline earth metal niobates and metal oxides.

16. The vertical-cavity surface-emitting laser of claim 14, wherein said first monocrystalline layers comprise Sr_xB_1-xTiO₃, where x ranges from 0 to 1.

17. The vertical-cavity surface-emitting laser of claim 15, wherein said third monocrystalline layers comprise Sr_xB_1-xTiO₃, where x ranges from 0 to 1.

18. The vertical-cavity surface-emitting laser of claim 8, wherein said second monocrystalline layers comprise one of a semiconductor or compound semiconductor material.

19. The vertical-cavity surface-emitting laser of claim 8, wherein said fourth monocrystalline layers comprise one of a semiconductor or compound semiconductor material.

20. The vertical-cavity surface-emitting laser of claim 18, wherein said second monocrystalline layers comprise a compound semiconductor material selected from the group consisting of GaAs, GaAlAs, InP, GaInAs, GaInP, CdS, CdHgTe, PbSe, PbTe, PbSSe, ZnSe and ZnSeS.

21. The vertical-cavity surface-emitting laser of claim 19, wherein said fourth monocrystalline layers comprise a compound semiconductor material selected from the group consisting of GaAs, GaAlAs, InP, GaInAs, GaInP, CdS, CdHgTe, PbSe, PbTe, PbSSe, ZnSe and ZnSeS.

22. The vertical-cavity surface-emitting laser of claim 8, wherein said active layer comprises material selected from the group comprising GaAs, GaAlAs, GaInAs, and GaInAsP.

23. The vertical-cavity surface-emitting laser of claim 8, wherein said first monocrystalline material layers are characterized by a first lattice constant and said second monocrystalline layers are characterized by a second lattice constant which is substantially lattice matched to said first lattice constant.

24. The vertical-cavity surface-emitting laser of claim 8, wherein said third monocrystalline layers are characterized by a third lattice constant and said fourth monocrystalline layers are characterized by a fourth lattice constant which is substantially lattice matched to said third lattice constant.

26. The vertical-cavity surface-emitting laser circuit of claim 25, wherein the substrate comprises silicon.

27. The vertical-cavity surface-emitting laser circuit of claim 25, further comprising an amorphous oxide layer overlying said substrate and underlying said first DBR mirror.

28. The vertical-cavity surface-emitting laser circuit of claim 25, further comprising an amorphous oxide layer overlying said active layer and underlying said second DBR mirror.

29. The vertical-cavity surface-emitting laser circuit of claim 25, wherein said first index of refraction and said second index of refraction differ by at least about 1.0.

30. The vertical-cavity surface-emitting laser circuit of claim 25, wherein said third index of refraction and said fourth index of refraction differ by at least about 1.0.

31. The vertical-cavity surface-emitting laser circuit of claim 25, wherein said first monocrystalline layers comprise an oxide selected from the group consisting of alkaline earth metal titanates, alkaline earth metal zirconates, alkaline earth metal hafnates, alkaline earth metal tantalates, alkaline earth metal ruthenates, alkaline earth metal niobates and metal oxides.

32. The vertical-cavity surface-emitting laser circuit of claim 25, wherein said third monocrystalline layers comprise an oxide selected from the group consisting of alkaline earth metal titanates, alkaline earth metal zirconates, alkaline earth metal hafnates, alkaline earth metal tantalates, alkaline earth metal ruthenates, alkaline earth metal niobates and metal oxides.

33. The vertical-cavity surface-emitting laser circuit of claim 31, wherein said first monocrystalline layers comprise Sr_xB_1-xTiO₃, where x ranges from 0 to 1.

34. The vertical-cavity surface-emitting laser circuit of claim 32, wherein said third monocrystalline layers comprise Sr_xB_1-xTiO₃, where x ranges from 0 to 1.

35. The vertical-cavity surface-emitting laser circuit of claim 25, wherein said second monocrystalline layers comprise one of a semiconductor or compound semiconductor material.

36. The vertical-cavity surface-emitting laser circuit of claim 25, wherein said fourth monocrystalline layers comprise one of a semiconductor or compound semiconductor material.

37. The vertical-cavity surface-emitting laser circuit of claim 35, wherein said second monocrystalline layers comprise a compound semiconductor material selected from the group consisting of GaAs, GaAlAs, InP, GaInAs, GaInP, CdS, CdHgTe, PbSe, PbTe, PbSSe, ZnSe and ZnSeS.

38. The vertical-cavity surface-emitting laser circuit of claim 36, wherein said fourth monocrystalline layers comprise a compound semiconductor material selected from the group consisting of GaAs, GaAlAs, InP, GaInAs, GaInP, CdS, CdHgTe, PbSe, PbTe, PbSSe, ZnSe and ZnSeS.

39. The vertical-cavity surface-emitting laser circuit of claim 25, wherein said active layer comprises material selected from the group comprising GaAs, GaAlAs, GaInAs, and GaInAsP.

40. The vertical-cavity surface-emitting laser circuit of claim 25, wherein said first monocrystalline material layers are characterized by a first lattice constant and said second monocrystalline layers are characterized by a second lattice constant which is substantially lattice matched to said first lattice constant.

41. The vertical-cavity surface-emitting laser circuit of claim 25, wherein said third monocrystalline layers are characterized by a third lattice constant and said fourth monocrystalline layers are characterized by a fourth lattice constant which is substantially lattice matched to said third lattice constant.

25. A vertical-cavity surface-emitting laser circuit comprising:

a monocrystalline substrate;

a portion of an MOS circuit formed in said substrate;

a portion of a vertical-cavity surface-emitting laser overlying said substrate, wherein said portion of said vertical-cavity surface-emitting laser comprises;

a first DBR mirror epitaxially grown overlying said substrate, wherein said first DBR mirror comprises;

a plurality of alternating first monocrystalline layers and second monocrystalline layers,

wherein said first monocrystalline layers comprise an oxide material having a cubic structure and a first index of refraction;

wherein said second monocrystalline layers comprise a semiconductor material having a second index of refraction, and

wherein said first index of refraction and said second index of refraction differ by at least about 0.5;

an active layer epitaxially grown overlying said first DBR mirror;

a second DBR mirror epitaxially grown overlying said active layer, wherein said second DBR mirror comprises;

a plurality of alternating third monocrystalline layers and fourth monocrystalline layers;

wherein said third monocrystalline layers comprise an oxide material having a cubic structure and a third index of refraction;

wherein said fourth monocrystalline layers comprise a semiconductor material having a fourth index of refraction, and

wherein said third index of refraction and said fourth index of refraction differ by at least about 0.5; and

an electrical connection electrically coupling said portion of an MOS circuit and said portion of a vertical-cavity surface-emitting laser.

42. A process for fabricating a high contrast reflective mirror comprising:

providing a monocrystalline substrate;

epitaxially growing alternating first monocrystalline layers and second monocrystalline layers,

wherein said first monocrystalline layers comprise an oxide material having a cubic structure and a first index of refraction,

wherein said second monocrystalline layers comprise a semiconductor material having a second index of refraction, and

wherein said first index of refraction and said second index of refraction differ by at least 0.5.

43. The process of claim 42, wherein said growing comprises growing alternating first monocrystalline layers and second monocrystalline layers wherein said first index of refraction and said second index of refraction differ by at least about 1.0.

44. The process of claim 42, wherein said growing comprises growing first monocrystalline layers formed of an oxide material selected from the group consisting of alkaline earth metal titanates, alkaline earth metal zirconates, alkaline earth metal hafnates, alkaline earth metal tantalates, alkaline earth metal ruthenates, alkaline earth metal niobates and metal oxides.

45. The process of claim 42, wherein said growing comprises growing first monocrystalline layers formed of Sr_xB_1-xTiO₃, where x ranges from 0 to 1.

46. The process of claim 42, wherein said growing comprises growing second monocrystalline layers formed of one of a semiconductor or a compound semiconductor material.

47. The process of claim 46, wherein said growing comprises growing second monocrystalline layers formed of a compound semiconductor material selected from the group consisting of GaAs, GaAlAs, InP, GaInAs, GaInP, CdS, CdHgTe, PbSe, PbTe, PbSSe, ZnSe and ZnSeS.

48. The process of claim 42, wherein said growing comprises growing alternating first monocrystalline layers having a first lattice constant and second monocrystalline layers having a second lattice constant, and wherein said second lattice constant is substantially lattice matched to said first lattice constant.