Silicon nano-collection analytic device
First Claim
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1. A silicon nano-collection analytic device having an inlet, an analysis region, a vent and a signal path said device formed from a distinct bottom and top member:
- wherein the bottom member is silicon and has a proximal end, a distal end and an etched region disposed between the proximal and distal ends, where the etched region has an inlet portion, an analytic portion, and a vent portion with the inlet portion located at the proximal end, the vent portion located at the distal end and the analytic portion disposed between the inlet and vent portions;
wherein the top member is dimensionally mated to the bottom member so that the analysis portion is sealed to yield an analysis region defining the interior of the device, the inlet and vent are created with the analysis region in fluid communication with the inlet and vent, and the members provide a signal path for communicating the state of the analysis from the interior of the device to the exterior.
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Abstract
This invention relates to a nanofabricated device for collecting and analyzing small volumes of fluid for analysis. It comprises an etched silicon device having top and bottom members which together form an inlet, analytic region and vent where the inlet has a tapered surface for ready collection of fluid.
213 Citations
44 Claims
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1. A silicon nano-collection analytic device having an inlet, an analysis region, a vent and a signal path said device formed from a distinct bottom and top member:
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wherein the bottom member is silicon and has a proximal end, a distal end and an etched region disposed between the proximal and distal ends, where the etched region has an inlet portion, an analytic portion, and a vent portion with the inlet portion located at the proximal end, the vent portion located at the distal end and the analytic portion disposed between the inlet and vent portions;
wherein the top member is dimensionally mated to the bottom member so that the analysis portion is sealed to yield an analysis region defining the interior of the device, the inlet and vent are created with the analysis region in fluid communication with the inlet and vent, and the members provide a signal path for communicating the state of the analysis from the interior of the device to the exterior. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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17. A process for manufacturing a silicon nano-collection analytic device having an inlet, an analysis region, a vent and a signal path for communicating from the interior of the analysis region to the exterior said device formed from a distinct bottom and top member wherein the process comprises:
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etching into silicon to form a bottom member having a proximal end, a vent portion in the distal end, an inlet portion in the proximal end, and an analysis region disposed between the vent portion and inlet portion end, contacting the bottom member with the top member where the top member is dimensionally mated to the bottom member to form the inlet and vent, and to seal the analysis portion to yield the analysis region defining an interior with a signal path.
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34. A method of determining the presence of analytes in a silicon nano-collection analytic device comprising:
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i. providing a silicon nano-collection analytic device having an inlet, an analysis region, a vent and a signal path said device formed from a distinct bottom and upper member;
wherein the bottom member is silicon and has a proximal end, a distal end and an etched region disposed between the proximal and distal ends, where the etched region has an inlet portion, an analytic portion, and a vent portion with the inlet portion located at the proximal end, the vent portion located at the distal end and the analytic portion disposed between the inlet and vent portions;
wherein the top member is dimensionally mated to the bottom member so that the analysis portion is sealed to yield an analysis region defining the interior of the device, the inlet and vent are created with the analysis region in fluid communication with the inlet and vent, and the members provide a signal path for communicating the state of the analysis from the interior of the device to the exterior. ii. introducing fluid containing analytes into the inlet;
iii. permitting the fluid to enter the analysis region; and
,iv. communicating the state of the analysis via the signal pathway.
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Specification