System and method for filtering output in mass flow controllers and mass flow meters

• US 20020161559A1
• Filed: 04/26/2002
• Published: 10/31/2002
• Est. Priority Date: 04/27/2001
• Status: Active Grant

• Current Assignee: Celerity Incorporated (ICHOR Holdings, Ltd.)
• Original Assignee: Entegris Incorporated
• Inventors: Tariq, Faisal
• Granted Patent: US 6,865,520 B2
• Time in Patent Office: Days
• US Class Current: 702/190
• CPC Class Codes: G05B 11/42 for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
• CPC Class Codes: G05B 13/021 in which a variable is automatically adjusted to optimise the performance

Abstract

Embodiments of the present invention provide a method for filtering an indicated flow. One embodiment of the present invention can include the steps of (i) determining if the indicated flow is within an allowable deviation of a baseline, (ii) if the indicated flow is within the allowable deviation, outputting the indicated flow as the filtered indicated flow, and (iii) if the indicated flow is not within the allowable deviation, outputting a value that is within the predefined range as the filtered indicated flow. This embodiment of the present invention can also include determining if the indicated flow has exceed a buffer. If the indicated flow has not exceeded the buffer, one embodiment of the present invention can continue to output the value that is within the allowable deviation. If, however, the indicated flow has exceeded the buffer, a timer can be started. If the indicated flow does not return to within the allowable deviation before the timer reaches a clock limit, the embodiment of the present invention can output the indicated flow, which remains outside of the buffer, as the filtered indicated flow.

Another embodiment of the present invention can include the steps of (i) filtering the indicated flow to derive an intermediate filtered indicated flow, (ii) deriving a weighted first derivative of the intermediate filtered indicated flow, and (iii) outputting a filtered indicated flow comprising the sum of the intermediate filtered indicated flow and the weighted first derivative of the intermediate filtered indicated flow.

Claims

1. A method for filtering an indicated flow in a mass flow device wherein said indicated flow a function of actual gas flow, the method comprising:

determining if said indicated flow is within an allowable deviation of a baseline;

if said indicated flow is within said allowable deviation of said baseline, outputting said indicated flow as a filtered indicated flow; and

if said indicated flow is not within said allowable deviation of said baseline, outputting a value within said allowable deviation of said baseline as said filtered indicated flow.

2. The method for filtering an indicated flow according to claim 1 further comprising the steps of:

if the said flow is not within said allowable deviation of said baseline;

starting a timer having a clock limit;

determining if said indicated flow has returned to within said allowable deviation before said timer reaches said clock limit;

if said indicated flow has returned to within said allowable deviation before said timer reaches said clock limit, outputting said indicated flow as said filtered indicated flow; and

otherwise, outputting said value within said allowable deviation until said timer reaches said clock limit and outputting said indicated flow as said filtered indicated flow after said timer reaches said clock limit.

3. The method for filtering an indicated flow according to claim 2, further comprising:

outputting said indicated flow as said filtered indicated flow for a delay period; and

continuing to output said indicated flow as said filtered indicated flow without filtering until said filtered indicated flow reaches an approximately steady state.

4. The method for filtering an indicated flow according to claim 1, further comprising:

determining if said indicated flow has exceeded a buffer;

if said indicated flow has exceeded said buffer, engaging a timer having a clock limit;

determining if said indicated flow has returned to being within said buffer prior to said timer reaching said clock limit;

if said indicated flow has returned to within said buffer prior to said timer reaching said clock limit;

returning said indicated flow as said filtered indicated flow if said indicated flow is within said allowable deviation; and

returning said value within said allowable deviation as said indicated flow and resetting said timer if said indicated flow is not within said allowable deviation but is within said buffer; and

if said indicated flow has not returned to within said buffer prior to said timer reaching said clock limit, outputting said indicated flow as said filtered indicated flow.

5. The method for filtering an indicated flow according to claim 4, further comprising:

outputting said indicated flow as said filtered indicated flow for a delay period; and

continuing to output said indicated flow as said filtered indicated flow until said indicated flow reaches an approximately steady state without filtering.

6. The method for filtering an indicated flow according to claim 1, further comprising:

outputting said indicated flow as said filtered indicated flow for a delay period; and

continuing to output said indicated flow as said filtered indicated flow until said filtered indicated flow reaches an approximately steady state without filtering.

7. The method for filtering an indicated flow according to claim 1, wherein said allowable deviation is at least plus or minus one percentage of a set point.

8. A method for filtering an indicated flow in a mass flow controller comprising:

(A) outputting said indicated flow as said filtered indicated flow for a delay period;

(B) when it is determined that said indicated flow reaches an approximately steady state, outputting said indicated flow as said filtered indicated flow;

(C) determining if said indicated flow has remained within an allowable deviation from a baseline;

(D) if said indicated flow has remained within said allowable deviation, continuing to output said indicated flow as said filtered indicated flow; and

(E) if said indicated flow has not remained within said allowable deviation;

(1) outputting a value from within said allowable deviation as said filtered indicated flow;

(2) determining if said indicated flow has exceeded a buffer;

(3) if said indicated flow has exceeded said buffer;

a) engaging a timer having a clock limit;

b) determining if said indicated flow has returned to within said buffer prior to said timer reaching said clock limit; and

c) if said indicated flow has not returned to being within said buffer prior to said timer reaching said clock limit, outputting said indicated flow as said filtered indicated flow; and

d) if said indicated flow has returned to being within said buffer prior to said timer reaching said clock limit;

i) outputting said indicated flow as said filtered indicated flow if said indicated flow is within said allowable deviation; and

ii) continuing to output said value from within said allowable deviation as said filtered indicated flow if said indicated flow is not within said allowable deviation but is within said buffer.

9. The method for filtering an indicated flow according to claim 8, wherein said baseline comprises a set point.

10. The method for filtering an indicated flow according to claim 8, wherein said value from within said allowable deviation comprises a previous sampled value of said indicated flow that was within said allowable deviation.

11. The method for filtering an indicated flow according to claim 8 wherein said allowable deviation is at least plus or minus one percent of a set point.

13. The method for filtering an indicated flow according to claim 12, wherein said intermediate filtered indicated flow is derived using running average.

14. The method for filtering an indicated flow according to claim 12, wherein said intermediate filtered indicated flow is derived using IIR.

15. The method for filtering an indicated flow according to claim 12, wherein said intermediate filtered indicated flow is derived using FIR.

17. The system for filtering an indicated flow of claim 16, wherein said mass flow controller is further operable to:

if said indicated flow is not within said first predefined range;

engage a timer having a clock limit; and

determine if said indicated flow has returned to being within said allowable deviation prior to said timer reaching said clock limit.

18. The system for filtering an indicated flow of claim 17, wherein said computer readable instructions are further executable to:

output said indicated flow as said filtered indicated flow for a delay period; and

continue to output said indicated flow as said filtered indicated flow until said filtered indicated flow comes within said first predefined range without filtering.

19. The system for filtering an indicated flow of claim 16, wherein said mass flow controller is further operable to:

determine if said indicated flow has exceeded a buffer;

if said indicated flow has exceeded a buffer, start a timer having a clock limit;

determine if said indicated flow has returned to being within said buffer prior to said timer reaching said clock limit;

if said indicated flow has returned to being within said buffer prior to said timer reaching said predetermined time limit;

return said indicated flow as said filtered indicated flow if said indicated flow is within said allowable deviation; and

return said value that is within said allowable deviation as said indicated flow if said indicated flow is not within said allowable deviation; and

otherwise, output said indicated flow as said filtered indicated flow.

20. The system for filtering an indicated flow of claim 19, wherein said mass flow controller is further operable to:

output said indicated flow as said filtered indicated flow for a delay period; and

continue to output said indicated flow as said filtered indicated flow until said filtered indicated flow comes within said allowable deviation without filtering.

21. The system for filtering an indicated flow of claim 20, wherein said mass flow controller is further operable to:

output said indicated flow as said filtered indicated flow for a delay period; and

continuing to output said indicated flow as said filtered indicated flow until said filtered indicated flow comes within said allowable deviation.

12. A method for filtering an indicated flow in a mass flow meter comprising:

filtering said indicated flow to derive an intermediate filtered indicated flow;

deriving a weighted first derivative of said intermediate filtered indicated flow; and

summing said intermediate filtered indicated flow and said weighted first derivative of said intermediate filtered indicated flow to derive a filtered indicated flow.

16. A mass flow controller operable to:

determine if an indicated flow is within an allowable deviation of a baseline;

if said indicated flow is within said allowable deviation, output said indicated flow as a filtered indicated flow; and

if said indicated flow is not within said allowable deviation, output a value that is within said allowable deviation as said filtered indicated flow.

22. A system for filtering an indicated flow comprising a mass flow meter operable to:

filter an indicated flow to derive an intermediate filtered indicated flow;

derive a weighted first derivative of said filtered indicated flow; and

derive an indicated flow from said sum of said intermediate filtered indicated flow and said weighted first derivative of said intermediate filtered indicated flow.

23. The system for filtering an indicated flow of claim 22, wherein said intermediate filtered indicated flow is derived using running average.

24. The system for filtering an indicated flow of claim 22, wherein said intermediate filtered indicated flow is derived using IIR.

25. The system for filtering an indicated flow of claim 22, wherein said intermediate filtered indicated flow is derived using FIR.