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Method and apparatus for detecting and latching the position of a MEMS moving member

  • US 20020163709A1
  • Filed: 05/03/2002
  • Published: 11/07/2002
  • Est. Priority Date: 05/04/2001
  • Status: Abandoned Application
First Claim
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1. An apparatus for detecting the position of an optical element comprising:

  • an optical element;

    an actuator coupled to said optical element for causing said optical element to move between at least a first position and a second position;

    a sensor coupled to set said optical element for detecting the motion of said optical element and outputting a position detection signal in response thereto, the sensor including a movable electrode coupled to said optical member.

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