Method and apparatus for detecting and latching the position of a MEMS moving member

• US 20020163709A1
• Filed: 05/03/2002
• Published: 11/07/2002
• Est. Priority Date: 05/04/2001
• Status: Abandoned Application

• Current Assignee: L3 Optics Incorporated
• Original Assignee: L3 Optics Incorporated
• Inventors: Mirza, Amir Raza
• Application Number:
  US10/137,857
• Publication Number:
  US 20020163709A1
• Time in Patent Office: Days
• US Class Current: 359/295
• CPC Class Codes: G02B 2006/121 Channel; buried or the like
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/132 by deposition of thin films
• CPC Class Codes: G02B 6/136 by etching

Abstract

An apparatus for detecting the position of an optical element includes an actuator coupled to the optical element. A sensor coupled to the optical element senses the movement of the optical element. The sensor includes a moveable electrode coupled to the optical element for outputting a position detection signal.

Claims

1. An apparatus for detecting the position of an optical element comprising:

an optical element;

an actuator coupled to said optical element for causing said optical element to move between at least a first position and a second position;

a sensor coupled to set said optical element for detecting the motion of said optical element and outputting a position detection signal in response thereto, the sensor including a movable electrode coupled to said optical member.

2. The apparatus of claim 1, wherein said moveable electrode travels along a travel path with said optical member, and further comprising a second electrode within said travel path, a first capacitor coupled between said moveable electrode and said second electrode for measuring the capacitance between said moveable electrode and second electrode, and a third electrode disposed in said travel path such that said moveable electrode is disposed between said second electrode and third electrode;

a capacitor coupled between said moveable electrode and third electrode, the sensor determining a difference in capacitance between the first capacitor and the second capacitor and determining the position of the optical element in response thereto.

3. The apparatus of claim 2, wherein said moveable electrode, second electrode and third electrode are comb electrodes.

4. The apparatus of claim 2, further comprising a circuit coupled to said first capacitor and second capacitor for converting said difference in capacitance into a voltage signal corresponding to the position of the optical member.

5. The apparatus of claim 4, wherein the voltage signal is output to said actuator to control said actuator and said voltage signal is input to said circuit as a feedback loop so that the control signal is modified in response to the voltage.

6. The apparatus of claim 1, further comprising a base;

said optical element being disposed on said base and said first electrode being coupled to said base.

7. The apparatus of claim 6, wherein said base is movable along a path of motion in response to actuation of said actuator, and said base further comprising a first extension extending from said base in a direction substantially orthogonal to said path of motion;

and a stop movable, in a direction substantially orthogonal to said path of motion of said base, between a first position outside of the path of motion and a second position within the path of motion, said stop engaging said extension when in said second position to latch said base at a position along the path of motion.

8. The apparatus of claim 7, wherein said base is formed with a second extension on an opposed side of said base from said first extension, said second extension extending in a direction substantially orthogonal to the path of motion of the base;

a second stop, movable along a direction substantially orthogonal to said path of motion of the base, between a first position outside of the path of motion and a second position within the path of motion, so that the second stop latches the base at the position along the path of motion.

9. The apparatus of claim 1, wherein said base moves along a path of motion, said base further comprising an extension extending from one end of said base in a direction substantially orthogonal to said path of motion;

a second extension at an opposite end of said base extending from said base in a direction substantially orthogonal to said path of motion, and said apparatus further comprising a stationery stop disposed along said path of motion between said first extension and second extension at a position which prevents over actuation of said actuator.

10. An apparatus for latching a MEMS optical element comprising:

an actuator;

a base coupled to said actuator;

said base being movable between a first position and a second position along a path of movement in response to activation and deactivation of said actuator;

an extension extending from one side of said base in a direction substantially orthogonal to the path of motion;

an optical element disposed on said base;

a movable stop moving in a direction substantially orthogonal to said path of motion between a first position outside of the path of motion and at least a second position within the path of motion for engaging said extension when, said moveable stop is in said second position and said actuator being in a deactivated state.

11. The apparatus of claim 10, wherein said base further comprises a second extension extending from an opposite side of the base in a direction substantially orthogonal to the direction of motion;

and said apparatus further comprising a stop movable, along a direction substantially orthogonal to said path of motion, between a first position, in which said stop is not within said path of motion, and a second position, in which said stop is disposed within said path of motion, and engaging said second extension when said stop is in said second position and said actuator being in a deactivated state.

12. The apparatus of claim 11, further comprising a third extension extending in a direction substantially orthogonal to the path of motion;

said apparatus further comprising a stationery stop disposed in the path of motion between said first extension and third extension.

15. The method of claim 14, wherein said position detection signal is a voltage signal corresponding to said difference in capacitances, and further comprising the step of applying the voltage to the actuator.

16. The method of claim 14, further comprising the step of utilizing said voltage signal to position said optical element at a position where the difference in capacitance is zero.

13. An apparatus for preventing undesired movement of an optical MEMS element comprising:

an actuator;

a base coupled to said actuator and capable to being moved along a path of motion in response to the activation and deactivation of said actuator;

said base including a first extension extending from said base in a direction substantially orthogonal to the direction of motion;

and a second extension spaced from said first extension and extending from said base in a direction substantially orthogonal to said path of motion;

an optical element disposed on said base; and

a stationery stop disposed in said path of motion between said first extension and said second extension.

14. A method for detecting the position of a moveable optical element moved by an actuator comprising the steps of:

coupling a moveable electrode to said optical element, so that the moveable electrode moves with the optical element along a path;

providing a second electrode along the path;

providing a third electrode along the path, the moveable electrode being disposed between the second and third electrodes;

measuring the capacitance between the moveable electrode and the first electrode;

measuring the capacitance between the moveable electrode and third electrode; and

obtaining a difference between the two measured capacitances and producing a position detection signal in response thereto.