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Process and apparatus for removing residues from the microstructure of an object

  • US 20020164873A1
  • Filed: 02/08/2002
  • Published: 11/07/2002
  • Est. Priority Date: 02/09/2001
  • Status: Abandoned Application
First Claim
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1. A process for removing residues from the microstructure of an object comprising steps of:

  • preparing a remover including CO2, an additive for removing the residues and a co-solvent for dissolving said additive in said CO2 at a pressurized fluid condition; and

    bringing the object into contact with said remover so as to remove the residues from the object.

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