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Magnetoelastic sensor for characterizing properties of thin-film/coatings

  • US 20020166382A1
  • Filed: 10/20/2001
  • Published: 11/14/2002
  • Est. Priority Date: 10/20/2000
  • Status: Active Grant
First Claim
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1. An apparatus for determining elasticity characteristics of a thin-film layer, comprising:

  • a sensor element having a base magnetostrictive element at least one surface of which is at least partially coated with the thin-film layer, said sensor element operatively arranged to vibrate within a time-varying interrogation magnetic field;

    a receiver, remote from said sensor element, to measure a plurality of values for magneto-elastic emission intensity of said sensor element to identify a magneto-elastic resonant frequency value for said sensor element; and

    whereby using a value for density of the thin-film layer and a value for mass of said base magnetostrictive element and said magneto-elastic resonant frequency value, at least one of the elasticity characteristics is determined.

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