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Detection of defects by thermographic analysis

  • US 20020167987A1
  • Filed: 07/03/2002
  • Published: 11/14/2002
  • Est. Priority Date: 08/25/2000
  • Status: Abandoned Application
First Claim
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1. An inspection system for the detection of an anomaly in a sample comprising a thermal heater array comprising a plurality discrete individually controllable heat source elements capable of imparting heat to a sample a heat diffuser component an infrared camera component for monitoring infrared emissions from a side of the sample and deriving a signal indicative of the temperature profile of this side of the sample, a sample support component for supporting a sample for inspection said sample support component, said heat diffuser component and said thermal heater array being configured and disposed such that, when said support component supports a sample for inspection, the sample has an observation side and an opposite heat exposure side, the infrared camera is disposed on the observation side for monitoring the observation side and the diffuser component and the thermal heater array are disposed on the heat exposure side for exposing the heat exposure side to thermal radiation, the heat diffuser component being disposed between the sample and the thermal heater array.

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