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Suspended high reflectivity coating on release structure and fabrication process therefor

  • US 20020168136A1
  • Filed: 05/08/2001
  • Published: 11/14/2002
  • Est. Priority Date: 05/08/2001
  • Status: Active Grant
First Claim
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1. A process for fabricating a micro-optical electromechanical system device, the process comprising:

  • depositing an optical coating that is supported by a device layer;

    removing a sacrificial layer to form a release structure in the device layer along an optical axis; and

    forming a device layer port by removing a portion of the device layer in a region around the optical axis.

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